Clean Stocker Vertical Rack Design for Contamination Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing storage solutions for semiconductor reticles and their containers are prone to contamination due to wind generated by transportation devices, and they lack efficient compact storage and retrieval methods.
Innovation Solution
A clean stocker system with vertically overlapping article and container storage racks, utilizing a downflow of clean gas, and independent rotatable racks, along with dedicated transportation devices, to maintain a clean environment and enable efficient storage and retrieval of articles and containers in a compact space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If articles are stored in a conventional horizontal arrangement with transportation devices moving along travel routes, then transportation and retrieval are enabled, but articles may be contaminated by wind generated by the transportation devices
Solution Approach 1:
The patent transitions from horizontal storage arrangement to vertical stacking arrangement, where articles are stored in multiple layers vertically. This dimensional change allows transportation devices to operate in horizontal planes without generating wind that directly contacts stored articles, thereby preventing contamination while maintaining transportation functionality
Solution Approach 2:
The storage system is divided into multiple independent storage layers stacked vertically, with each layer capable of independent operation. This segmentation isolates articles in separate clean zones, preventing wind from transportation devices in one layer from contaminating articles in other layers
2Quantity of substance
If multiple storage racks are arranged horizontally to store large numbers of articles and containers, then storage capacity increases, but the space required increases
Solution Approach 1:
The patent utilizes vertical space by stacking storage racks in multiple layers vertically rather than arranging them horizontally. This allows the system to store a large number of articles and containers by exploiting the third dimension (height), significantly reducing the floor space required while maintaining high storage capacity
Solution Approach 2:
The storage system employs nested vertical stacking where multiple storage racks are positioned one above another in a compact vertical configuration. This nesting arrangement maximizes space utilization by storing articles and containers in overlapping vertical positions, achieving high density storage in a compact footprint
3Quantity of substance
If storage racks are arranged to optimize storage capacity, then more articles can be stored, but retrieval efficiency decreases due to increased operational range requirements
Solution Approach 1:
The vertical stacking arrangement organizes storage racks in multiple elevated layers, allowing retrieval operations to occur in discrete horizontal planes. This dimensional organization enables efficient retrieval by limiting transportation device movement to specific vertical levels, reducing operational range requirements compared to sprawling horizontal arrangements
Solution Approach 2:
The storage system is segmented into multiple independent vertical levels or layers, with each level functioning as a separate operational zone. This segmentation allows retrieval operations to be confined to specific vertical planes, reducing the travel distance and operational complexity for transportation devices while maintaining high storage capacity across all levels
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively prevents contamination, allows for a high-density storage of articles and containers, reduces the operational range of transportation devices, and facilitates efficient retrieval and storage by using the clean gas flow path, thereby ensuring clean storage and retrieval of a large number of articles and containers in a compact space.
Implementation Method 1
A down flow of a clean gas is provided in the clean stocker
Data Source
AI summary
A reticle rotatable rack is provided at an upper position, and a pod rotatable rack is provided at a lower position in a clean stocker. A clean gas is supplied downwardly. In the stocker, a pod transportation device and a reticle transportation device are elevated and lowered. Load ports, a pod opener, and the pod rotatable rack are connected by the pod transportation device. The pod opener and the reticle rotatable rack are connected by the reticle transportation device.