Clean Transfer Robot Uniform Airflow Exhaust Design
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In semiconductor fabrication facilities, existing transfer robots generate particles that contaminate the clean environment, posing a challenge for maintaining high cleanliness levels required for defect-free device production.
Innovation Solution
A clean transfer robot design featuring a robotic housing with an elongated slot for uniform airflow from the clean environment to an exhaust port, which carries particles generated by the moving mechanism outside the environment, minimizing backflow and maintaining cleanliness regardless of slot length through the use of flow restrictors like holes or slits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a transfer robot with moving mechanism is used in clean environment, then productivity and automation are improved, but particle contamination increases
Solution Approach 1:
The invention extracts and removes particles generated by the moving mechanism from the clean environment by providing a dedicated exhaust path that communicates with the exterior, separating the particle-laden air stream from the clean environment
Solution Approach 2:
The invention introduces an intermediary fluid flow (exhaust airflow) that acts as a mediator to carry particles away from the clean environment through the elongated slot, preventing direct contact between generated particles and the clean space
2Object-generated harmful factors
If conventional exhaust without uniform flow control is used, then particle removal is achieved, but back flow occurs compromising cleanliness
Solution Approach 1:
The invention changes the flow parameters by introducing uniform flow restrictions along the elongated slot, controlling the velocity and distribution of exhaust airflow to maintain positive pressure and prevent back flow into the clean environment
Solution Approach 2:
The uniform flow restrictions create a feedback mechanism where the controlled exhaust flow continuously monitors and maintains pressure differential, automatically preventing back flow when particles are generated
3Object-generated harmful factors
If elongated slot length is increased for better particle exhaust, then particle removal efficiency improves, but flow uniformity decreases
Solution Approach 1:
The invention segments the exhaust flow along the elongated slot by providing multiple uniform flow restrictions distributed at intervals, dividing the continuous slot into multiple controlled flow zones that maintain uniformity even over long distances
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces particle contamination in the clean environment, ensuring high cleanliness levels and scalability by establishing a uniform airflow that exhausts particles generated by the moving mechanism, thus preventing them from re-entering the clean space.
Implementation Method 1
The exhaust mechanism generates a flow, starting from the clean environment, passing through the elongated slot to the exhaust port, carrying the particles generated by the moving mechanism
Implementation Method 2
The uniform flow reduces or eliminates the back flow, thus further improves the cleanliness of the clean environment
Data Source
AI summary
A robot with improved cleanliness for use in a clean environment is disclosed, having a uniform flow through the open interface between the clean environment and the interior of the robot housing, passing the particle generation area to an exhaust port, keeping the particles from the clean environment. The uniform flow reduces or eliminates the back flow, and further allows the scalability of the open interface to prevent particles generated from moving mechanisms within the robot housing to contaminate the clean environment. The uniform flow can be established by designing the flow dynamic, centering the exhaust port, or by restricting the flow along the elongated slot, for example, by uniformly restricting the flow along the elongated slot, or by implementing a restrictor along the elongated slot.