Cleaning Apparatus for Organic EL Masks
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Solution Overview
Problem
The accuracy of vapor-depositing organic materials for organic electroluminescent (EL) elements is compromised due to the accumulation of organic materials on deposition masks, leading to narrowed holes and increased costs from frequent mask replacement.
Innovation Solution
A cleaning apparatus comprising a system with cleaning and rinse tanks, using hydrocarbon and fluorine compound solutions, and a carrying device to hold and move the mask at a predetermined angle, ensuring effective removal and reuse of organic materials from the mask without heat-induced damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the mask is reused multiple times for vapor-deposition processes, then productivity is improved by reducing mask replacement frequency, but manufacturing precision deteriorates due to organic material accumulation narrowing the holes
Solution Approach 1:
The patent applies parameter changes by transitioning the mask from a horizontal to a vertical orientation during cleaning. This positional parameter change allows the cleaning solution to effectively reach and remove organic material accumulation from the mask surface and holes, thereby restoring manufacturing precision while maintaining productivity through mask reuse
Solution Approach 2:
The patent introduces a cleaning solution as an intermediary substance between the mask and the organic material accumulation. This intermediary chemical agent facilitates the removal of contaminants that would otherwise directly affect vapor-deposition accuracy, enabling the mask to maintain precision over multiple uses
2Manufacturing precision
If the mask is cleaned thoroughly to remove organic material, then manufacturing precision is improved, but device complexity increases due to additional cleaning equipment and processes
Solution Approach 1:
The patent applies inversion by changing the mask orientation from horizontal to vertical during cleaning. This simple geometric inversion fundamentally improves cleaning effectiveness without requiring complex cleaning mechanisms, thereby achieving manufacturing precision restoration while minimizing increases in device complexity
Solution Approach 2:
The vertical positioning of the mask during cleaning allows gravity to assist the cleaning solution in reaching all surfaces of the mask, including the holes. This self-service approach utilizing gravitational force reduces the need for complex active cleaning mechanisms, balancing manufacturing precision improvement against device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus maintains mask accuracy and reduces costs by thoroughly cleaning and rinsing the mask, preventing organic material buildup and allowing for repeated use, thus enhancing the vapor-deposition process efficiency.
Implementation Method 1
a cleaning tank (21) for cleaning the mask (10) with a cleaning solution
Implementation Method 2
a rinse tank (51) for rinsing the mask (10) cleaned in the cleaning tank (21) with a rinse solution
Data Source
AI summary
The invention provides a cleaning apparatus which can remove an organic material for an organic EL element attaching to a mask made of a thin metal film. The cleaning apparatus of the invention includes first and second cleaning tanks cleaning a mask with a predetermined cleaning solution at room temperature, first and second rinse tanks rinsing the mask with a predetermined rinse solution at room temperature, and a carrying device holding the mask at a predetermined angle other than horizontally and carrying the mask held at the predetermined angle to the first and second cleaning tanks and the first and second rinse tanks without damage occurring to the thin metal film of the mask by stress caused by gravity. The carrying device holds the mask horizontally at first, stands up in a vertical direction while holding the mask to hold the mask at the predetermined angle.