Cleaning Body Head Unit Load Detection and Buoyancy Adjustment
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Solution Overview
Problem
Conventional substrate cleaning apparatuses face challenges in accurately detecting contact pressure due to the inclination of transfer belts when the cleaning body moves up and down due to substrate unevenness, leading to inaccurate pressure sensor readings.
Innovation Solution
The substrate cleaning apparatus integrates a cleaning body head unit with a rotating mechanism and a load detection unit, utilizing a Roberval-type load cell to detect the load from the cleaning body and a buoyancy imparting unit to adjust contact pressure, ensuring accurate detection and maintaining belt alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a transfer belt is used to transfer rotation from a separate motor to the cleaning body shaft, then the cleaning body can be rotated, but the belt becomes inclined when the cleaning body moves up and down due to substrate unevenness, causing inaccurate pressure sensor readings
Solution Approach 1:
The motor is integrated directly onto the cleaning body shaft, merging the rotation source with the cleaning body itself. This eliminates the transfer belt and its associated inclination problems, allowing accurate contact pressure detection while maintaining cleaning body rotation functionality.
Solution Approach 2:
The transfer belt and separate motor are removed from the system. By extracting these components and replacing them with a directly mounted motor, the source of measurement error (belt inclination) is eliminated while the essential function of cleaning body rotation is preserved.
2Measurement precision
If the motor is integrated directly onto the cleaning body shaft, then contact pressure detection accuracy is improved, but the rotating mechanism becomes more complex
Solution Approach 1:
The complex transfer belt mechanism is removed and replaced with a simple direct-mount motor configuration. This extraction of the intermediate transmission components simplifies the overall rotating mechanism while improving measurement accuracy.
Solution Approach 2:
The mechanical transfer belt system is replaced with a direct mechanical coupling of the motor to the shaft. This substitution eliminates the need for belts, pulleys, and intermediate transmission elements, reducing mechanical complexity while maintaining rotational function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for precise detection and adjustment of contact pressure, ensuring effective cleaning without belt inclination, thus enhancing the accuracy of contact pressure measurement.
Implementation Method 1
a first load detection unit of which one end is connected to the base member to detect a load received from the cleaning body head unit
Implementation Method 2
a buoyancy imparting unit connected to the other end of the first load detection unit to impart buoyancy to the cleaning body head unit via the first load detection unit
Data Source
AI summary
A substrate cleaning apparatus according to an exemplary embodiment of the present disclosure includes a cleaning body head unit, a first load detection unit, and a buoyancy imparting unit. In the cleaning body head unit, a cleaning body, a shaft configured to support the cleaning body, a rotating mechanism configured to rotate the shaft, and a base member are integrally retained by a base member. The first load detection unit includes one end connected to the base member of the cleaning body head unit to detect the load received from the cleaning body head unit. The buoyancy imparting unit is connected to the other end of the first load detection unit and imparts buoyancy to the cleaning body head unit via the first load detection unit.