Cleaning Jig Spattering Grooves for Cup Uniformity
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Solution Overview
Problem
Conventional cleaning methods for substrate treating apparatuses, such as disk-shaped cleaning jigs, struggle to uniformly clean surfaces at varying heights within the cup, leading to inefficient cleaning and potential contamination of substrates due to residual treatment liquids.
Innovation Solution
A substrate treating apparatus with a rotatable spin head, a cup surrounding the spin head, and a cleaning jig that discharges cleaning liquid through spattering guide grooves, allowing the liquid to spatter centrifugally onto the cup surfaces, along with a controller to adjust the cleaning liquid supply and rotational speed of the spin head for enhanced cleaning efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a disk-shaped cleaning jig is used, then the cleaning jig is simple in structure, but it cannot uniformly clean surfaces at various heights inside the cup
Solution Approach 1:
The cleaning jig is designed to rotate along with the spin head, transforming from a static disk-shaped structure to a dynamic rotating structure. This allows the cleaning liquid to be discharged radially outward in a rotating frame of reference, enabling uniform cleaning coverage across surfaces at various heights inside the cup while maintaining structural simplicity.
2Device complexity
If the cleaning jig is fixed relative to the cup, then the structure is simple, but it cannot efficiently clean surfaces at various heights
Solution Approach 1:
The cleaning jig is coupled to rotate together with the spin head, changing from a fixed relative position to a rotating relative position. This dynamic configuration enables the cleaning liquid to reach surfaces at various heights through radial discharge in the rotating frame, significantly improving cleaning efficiency without complicating the overall structure.
3Productivity
If treatment liquids are recovered through the cup, then the liquid treatment process is complete, but the treatment liquids stick to the cup and cause contamination
Solution Approach 1:
The cleaning jig discharges cleaning liquid radially outward before the treatment liquid can adhere to the cup surface. By performing the cleaning action during the liquid treatment process rather than after, the cleaning liquid prevents treatment liquid adhesion and eliminates the source of contamination before it occurs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus efficiently cleans the cup at various heights, ensuring thorough removal of treatment liquids and reducing contamination risks, while optimizing the use of space and improving cleaning efficiency by adjusting the cleaning liquid flow and rotational speed.
Implementation Method 1
discharges a cleaning liquid toward the cup through rotation of the spin head... the cleaning liquid provided from the nozzle unit spatters toward the cup with a centrifugal force due to the rotation of the spin head
Data Source
AI summary
The inventive concept relates to a substrate treating apparatus, and may include a substrate treating apparatus includes a rotatable spin head, a cup that surrounds the spin head, a cleaning jig seated on the spin head, and that discharges a cleaning liquid toward the cup through rotation of the spin head, and a nozzle unit located at an upper portion of the cleaning jig and that supplies the cleaning liquid to a center of an upper surface of the cleaning jig, and the cleaning jig includes spattering guide grooves formed to be recessed such that the cleaning liquid provided from the nozzle unit spatters toward the cup with a centrifugal force due to the rotation of the spin head.