Cleaning Liquid Quality Management for Semiconductor Objects
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Solution Overview
Problem
Current quality management systems in semiconductor manufacturing are process-based, making it difficult to strictly manage quality according to the time period during which a product was manufactured.
Innovation Solution
A quality management system that includes an acquisition unit for acquiring concentration period information, a database for storing object identification and cleaning period information, and a regulating valve controlled by a liquid quality measurement unit to manage the supply of cleaning liquid based on measured quality, ensuring strict quality management according to the time period.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If process-by-process quality management is implemented, then quality management conditions can be selected based on processing conditions, but it becomes difficult to strictly manage quality according to the time period during which products were manufactured
Solution Approach 1:
The system performs preliminary actions by storing the relationship between processing conditions and quality management conditions in advance, and by pre-assigning unique identification information to each product. This allows the system to automatically trace and manage quality conditions for specific time periods without real-time intervention, resolving the contradiction between maintaining quality strictness and avoiding time tracking losses.
Solution Approach 2:
The system creates information copies by storing processing conditions, quality management conditions, and time period data in a database associated with unique product identification. These digital copies enable accurate retrieval and analysis of historical quality data for any time period, ensuring both quality strictness and time tracking accuracy without requiring physical traceability.
2Productivity
If cleaning liquid is supplied continuously to cleaning tanks, then cleaning operations can be maintained, but the quality of cleaning liquid deteriorates over time as impurities concentrate
Solution Approach 1:
The system implements feedback control by measuring the liquid quality of cleaning liquid and using this information to control the opening and closing of regulating valves that supply cleaning liquid to cleaning tanks. When impurity concentration exceeds predetermined thresholds, the system automatically adjusts or stops supply, maintaining cleaning liquid quality while enabling continuous cleaning operations through regulated replenishment.
Solution Approach 2:
The system changes operational parameters by adjusting the supply rate and timing of cleaning liquid based on measured impurity concentrations. By dynamically modifying these parameters rather than using fixed continuous supply, the system maintains cleaning effectiveness while preventing excessive impurity accumulation, thus resolving the contradiction between productivity and manufacturing precision.
3Adaptability or versatility
If multiple cleaning tanks share a common cleaning liquid supply, then resource utilization is improved, but it becomes difficult to track which objects were cleaned with which specific cleaning liquid batches
Solution Approach 1:
The system introduces an intermediary information management layer that associates unique identification information with each product and tracks the specific cleaning liquid batch used for each cleaning operation. This intermediary tracking system enables multiple cleaning tanks to share cleaning liquid resources while maintaining complete traceability of which objects were cleaned with which specific batches, preventing information loss.
Solution Approach 2:
The system performs preliminary assignment of unique identification information to each product before cleaning operations. This pre-established identification framework enables automatic tracking and association of cleaning liquid batch information with specific products, allowing efficient resource sharing across multiple tanks while maintaining full traceability without requiring complex real-time monitoring.
Data Source
AI summary
An acquisition unit acquires concentration period information indicating a period of time during which impurities contained in cleaning liquid for cleaning objects are concentrated in a concentration means, a database stores as associated information object identification information uniquely assigned to the objects and cleaning period information indicating periods of time during which the objects were cleaned, and an identification unit, based on the concentration period information acquired by the acquisition unit and the associated information stored in the database, identifies the objects that were cleaned using the cleaning liquid corresponding to the cleaning liquid that was supplied to the concentration means during the concentration period indicated by the concentration period information.