Cleaning Member Mounting Mechanism With Rotation Fixing

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Solution Overview

Problem

The existing cleaning member mounting mechanisms for substrate cleaning apparatuses are cumbersome and time-consuming due to the rotatable nature of the cleaning member holding parts, making it difficult to mount and replace cleaning member assemblies efficiently.

Innovation Solution

A cleaning member mounting mechanism that includes a cleaning member holding part, a member rotation part for rotating the cleaning member assembly, and a moving part that restricts the rotation of the holding part by moving it into a fixed position along the axial direction, allowing for easy mounting and replacement of cleaning member assemblies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the cleaning member holding part is made rotatable to enable cleaning member assembly replacement, then the cleaning member can be replaced, but the mounting process becomes time-consuming and cumbersome

Engineering Contradiction:
Improvecleaning member replacement capabilityVSAvoidmounting time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The moving part performs a preliminary action by automatically moving the cleaning member holding part to the rotation fixed position when the cleaning member assembly is removed. This preliminary positioning action restricts rotation before mounting begins, eliminating the need for manual rotation adjustment during mounting and significantly reducing mounting time.

Inventive Principle:
Principle #10Preliminary action

2Ease of operation

If the cleaning member holding part remains rotatable during mounting, then the cleaning member can be installed, but the holding part may rotate during the process making mounting difficult

Engineering Contradiction:
Improvemounting easeVSAvoidholding part stability
Core Design Contradiction:
Ease of operationVSStability of the object's composition

Solution Approach 1:

The system dynamically changes the rotational state of the cleaning member holding part based on operational needs. When the cleaning member assembly is present, the holding part remains rotatable for cleaning operations. When the assembly is removed, the moving part automatically transitions the holding part to a rotation fixed position, providing stability during mounting and replacement operations.

Inventive Principle:
Principle #15Dynamics

3Stability of the object's composition

If a complex locking mechanism is added to restrict rotation during mounting, then rotation can be fixed, but the device complexity increases

Engineering Contradiction:
Improverotation fixationVSAvoidmounting mechanism complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The moving part serves itself by automatically moving the cleaning member holding part to the rotation fixed position when the cleaning member assembly is removed. This self-service mechanism eliminates the need for external locking devices or complex fixation mechanisms, achieving rotation restriction through the inherent movement capability of the moving part itself.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution simplifies the mounting process of cleaning member assemblies, reducing the time and effort required and preventing the cleaning member from becoming dirty during the replacement process, while also allowing for efficient rotation restriction without the need for complex locking mechanisms.

Implementation Method 1

the moving part may be an elastic member

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS11894244B2Cleaning member mounting mechanism and substrate cleaning apparatus
Publication Date: 2024.02.06 EBARA CORP
  • US11894244B2 patent drawing
  • US11894244B2 patent drawing
  • US11894244B2 patent drawing

AI summary

A cleaning member mounting mechanism has: a cleaning member holding part, to which a cleaning member assembly having a cleaning member for cleaning a substrate W can be mounted; a member rotation part for rotating the cleaning member assembly held by the cleaning member holding part; and a moving part which moves the cleaning member holding part along an axial direction when the cleaning member assembly is removed, thereby to bring the cleaning member holding part into a rotation fixed position to restrict a rotation of the cleaning member holding part.