Cleaning nozzle and cleaning method
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Solution Overview
Problem
Existing dry cleaning methods for holding faces in tape mounters often fail to prevent dust from reattaching after being blown off, leading to non-uniform tape adhesion and processing difficulties.
Innovation Solution
A cleaning nozzle system comprising an air nozzle that jets ionized air parallel to the cleaning target face and a suction nozzle adjacent to the air nozzle, which sucks reflected air to immediately capture dust particles, preventing reattachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If air is jetted to the holding face to clean dust by dry cleaning, then dust is blown off the holding face, but dust occasionally reattaches to the holding face
Solution Approach 1:
The invention combines a suction nozzle with the air nozzle to form an integrated cleaning device. The suction nozzle is positioned adjacent to the air nozzle and operates simultaneously to remove dust particles immediately after they are blown off by the air jet, preventing reattachment while maintaining cleaning effectiveness
Solution Approach 2:
The suction nozzle acts as an intermediary element between the air nozzle and the holding face. It captures dust particles in the air stream before they can settle back onto the holding face, serving as a mediator that prevents the harmful reattachment effect
2Manufacturing precision
If dust adheres to the holding face, then tape adhesion becomes non-uniform and processing becomes difficult, but cleaning by air jet alone cannot prevent dust reattachment
Solution Approach 1:
The air nozzle and suction nozzle are merged into a single cleaning assembly that performs both dust removal and dust capture functions simultaneously, ensuring that dust particles are continuously removed from the holding face surface during the cleaning process
Solution Approach 2:
The cleaning system maintains continuous action by having the suction nozzle operate concurrently with the air nozzle throughout the cleaning process, ensuring uninterrupted dust removal and preventing any period where dust could reattach to the holding face
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively suppresses dust reattachment to the cleaning target face, ensuring uniform tape adhesion and facilitating precise wafer processing by using ionized air jets and a parallel suction mechanism.
Implementation Method 1
the air nozzle is configured such that it jets ionized air from the jet port
Implementation Method 2
a suction nozzle having a suction port for sucking air on the cleaning target face
Data Source
AI summary
There is provided a cleaning nozzle that cleans a cleaning target face that is one of a holding face that holds a workpiece and/or a surface of the workpiece held on the holding face. The cleaning nozzle includes an air nozzle having an jet port for jetting air toward the cleaning target face and extending in a direction parallel to the cleaning target face, and a suction nozzle having a suction port for sucking air on the cleaning target face and arranged adjacent to and in parallel to the air nozzle.