Cleaning Sequence Control for Faster Process Chamber Updates
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Solution Overview
Problem
In manufacturing systems, adjusting or enhancing cleaning processes for process chambers is time-consuming, leading to delays in implementing updated substrate process recipes, which decreases throughput and efficiency due to the need for separate control logic updates for different types of process chambers.
Innovation Solution
A graphical user interface (GUI) is provided for users to manage and modify cleaning process sequences, allowing them to add or modify operations and generate instructions based on cleaning criteria, enabling direct execution by the system controller without requiring updates from entities managing control logic.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional control logic updates are used for cleaning processes, then cleaning effectiveness is maintained, but implementation time increases and throughput decreases
Solution Approach 1:
The system enables operators to independently update and manage cleaning process sequences through a graphical user interface without requiring assistance from control logic entities. The manufacturing system autonomously generates and implements cleaning sequences based on process chamber conditions, eliminating the time-consuming manual update process while maintaining cleaning effectiveness.
2Adaptability or versatility
If separate control logic updates are performed for different process chamber types, then cleaning specificity is improved, but system complexity and update time increase
Solution Approach 1:
The system implements a universal cleaning process management approach where a single graphical user interface and control framework can manage cleaning sequences for multiple different process chamber types. The system automatically adapts the cleaning sequences to specific chamber requirements without requiring separate control logic systems, reducing overall complexity while maintaining adaptability.
3Manufacturing precision
If manual adjustment of cleaning processes is performed, then cleaning quality is improved, but productivity decreases due to operator time requirements
Solution Approach 1:
The system continuously monitors process chamber conditions and automatically adjusts cleaning process sequences based on real-time feedback. Sensors detect chamber state parameters and the system dynamically modifies cleaning operations to maintain optimal cleaning quality without requiring manual operator intervention, thereby preserving productivity and throughput.
Solution Approach 2:
The cleaning process management system operates autonomously, with the manufacturing system self-adjusting cleaning sequences based on monitored conditions. This eliminates the need for operator time while maintaining or improving cleaning quality through automated decision-making and execution.
Data Source
AI summary
An indication of a sequence of cleaning operations associated with a substrate process at a manufacturing system is received. An indication of one or more criteria that trigger initiation of the sequence of operations during a process at one or more manufacturing equipment of the manufacturing system is also received. A set of instructions corresponding to the sequence of operations is generated. In response to a detection that at least one of the one or more criteria is satisfied, the generated set of instructions are executed to initiate the sequence of operations at the one or more manufacturing equipment.