Cleaning Sheet Thickness Profile for Adsorption Error Suppression
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Solution Overview
Problem
Existing cleaning methods for substrate processing apparatuses face challenges such as decreased operation rates and increased time and labor for cleaning due to adsorption errors during vacuum adsorption of cleaning sheets or transfer members.
Innovation Solution
A cleaning sheet with a cleaning layer that includes a polyimide-based resin or polybenzoxazole-based resin, featuring a specific thickness profile and pressure-sensitive adhesive layer, is designed to minimize adsorption errors by adjusting the size of the rising portion (crown) at the peripheral edge of the cleaning layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cleaning sheet or transfer member with a cleaning layer is used for vacuum adsorption on the adsorption stage, then foreign matter removing performance is improved, but adsorption errors occur due to thickness variations in the cleaning layer
Solution Approach 1:
The cleaning layer is designed with non-uniform thickness, featuring a peripheral edge portion with greater thickness than the central portion. This local variation in thickness provides a sealing effect at the edges during vacuum adsorption, preventing adsorption errors while maintaining the cleaning functionality across the entire surface.
2Manufacturing precision
If the cleaning layer is made thicker to improve sealing, then adsorption accuracy is improved, but the cleaning layer may not properly contact the adsorption stage surface
Solution Approach 1:
The cleaning layer employs a thickness gradient where the peripheral edge portion has greater thickness for sealing, while the central portion maintains appropriate thickness for contact. This local differentiation allows the edge to provide sealing effect without preventing the center from properly contacting the adsorption stage surface.
Solution Approach 2:
The thickness variation is introduced as a spatial dimension within the cleaning layer, transitioning from uniform thickness to non-uniform thickness distribution. This dimensional change enables simultaneous achievement of sealing at edges and proper contact at the center by varying thickness across the surface area.
3Ease of manufacture
If a uniform thickness is used for the cleaning layer, then manufacturing is simplified, but adsorption errors occur due to insufficient sealing at the periphery
Solution Approach 1:
Rather than using completely uniform or completely variable thickness, the cleaning layer employs a moderate variation where only the peripheral edge portion has greater thickness than the central portion. This localized approach provides sufficient sealing at edges to prevent adsorption errors while maintaining relative simplicity in the overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cleaning sheet effectively suppresses adsorption errors, ensuring reliable vacuum adsorption and maintaining the operational efficiency of substrate processing apparatuses.
Implementation Method 1
vacuum adsorption is generally performed by mounting the cleaning sheet or the transfer member provided with a cleaning function on the adsorption stage of the transfer device
Data Source
AI summary
Provided is a cleaning sheet including a cleaning layer that may be suitably used for a transfer member to be transferred in a substrate processing apparatus, the cleaning sheet being capable of effectively suppressing an adsorption error. A direction from an end portion of a surface of the cleaning layer toward a center thereof when viewed from a normal direction with respect to the surface is defined as a center direction, a region occupied by a width of 10 mm from the end portion toward the center direction in the surface is defined as an end portion region, and a maximum thickness L of the cleaning layer in the normal direction in the end portion region and an average thickness T of the cleaning layer in the normal direction in a region of the cleaning layer excluding the end portion region have a relationship of L−T≤5 μm.