Cleaning Solution Detection Device for Semiconductor Substrate Transfer
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Solution Overview
Problem
During the transfer of semiconductor substrates from cleaning to drying devices, the applied cleaning solution can be lost due to shaking or environmental factors, leading to process defects, inefficiencies, and economic losses, necessitating a detection and warning system to control the transfer process.
Innovation Solution
A cleaning solution detection device comprising a transfer part, a detector with a collection member and sensors to measure pressure and leakage, and a controller to determine dangerous situations and control the transfer operation, along with a warning system to prevent solution loss and defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is transferred from cleaning device to drying device, then the substrate can proceed to the next process step, but the cleaning solution may be lost due to shaking or external environment
Solution Approach 1:
The patent applies preliminary action by detecting cleaning solution status before the transfer operation completes. The detector monitors the cleaning solution on the substrate surface during the transfer process, allowing early warning before significant loss occurs, enabling preventive control measures to be taken.
Solution Approach 2:
The patent implements feedback control through the detector that continuously monitors cleaning solution status and provides information to the controller. The controller then adjusts the transfer operation based on this feedback, creating a closed-loop system that prevents cleaning solution loss while maintaining productivity.
2Manufacturing precision
If the cleaning solution is applied to the substrate surface, then the substrate can be cleaned effectively, but the cleaning solution may leak or fall during transfer
Solution Approach 1:
The detector provides real-time feedback on cleaning solution status during transfer, allowing the controller to adjust operations to prevent leakage while maintaining the cleaning solution application needed for effective cleaning.
Solution Approach 2:
The system applies preliminary anti-action by detecting cleaning solution status before leakage occurs and taking preventive control measures to counteract the harmful effect of potential leakage during the transfer process.
3Reliability
If a detection device is implemented to monitor cleaning solution, then cleaning solution loss can be prevented, but the device complexity increases
Solution Approach 1:
The patent replaces complex mechanical detection systems with a sensor-based detection device that can monitor cleaning solution status through non-contact or minimal-contact methods, reducing mechanical complexity while improving reliability.
Solution Approach 2:
The detection device is designed to perform multiple functions including detecting cleaning solution presence, monitoring leakage, and providing control feedback, reducing the need for multiple separate devices and thereby reducing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively detects and measures leaking cleaning solution, preventing process defects and enhancing efficiency by controlling the transfer process and alerting operators to potential losses.
Implementation Method 1
a pressure sensor configured to measure an internal pressure of the flow path
Implementation Method 2
a collection member configured to collect the cleaning solution that falls from the substrate
Data Source
AI summary
A cleaning solution detection device includes a transfer part configured to unload and transfer a substrate having a surface to which a cleaning solution is applied when a cleaning process is completed, a detector configured to detect the cleaning solution that falls from the surface of the substrate in a process in which the substrate is unloaded and transferred by the transfer part, and a controller configured to determine whether a dangerous situation occurs due to a fall of the cleaning solution based on information detected by the detector.