Cleanroom Gas Sampling Pipeline Purge Timing for Stable Monitoring
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Solution Overview
Problem
The instability of the gas environment in clean room process areas due to varying sampling cycles affects product yield, as the ratio between pipeline cleaning and sampling times is not fixed, leading to inconsistent gas composition.
Innovation Solution
A monitoring system with a controlled ratio of 1:5 between purging and sampling times, using a sampling device, analysis device, and air supply device, along with a control device to maintain consistent pipeline cleanliness and gas composition, including a buffer box for pressure stabilization and analysis modules for simultaneous contaminant analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the pipeline purging time is increased to ensure cleanliness, then the gas environment stability improves, but the sampling efficiency decreases
Solution Approach 1:
The system implements periodic purging cycles with a fixed 1:5 ratio between purging time and sampling time. This periodic action ensures the sampling pipeline is consistently cleaned while maintaining predictable sampling intervals, resolving the contradiction between pipeline cleanliness and sampling efficiency by establishing a regular, optimized cycle.
Solution Approach 2:
The system optimizes the purging time parameter to be exactly 1/5 of the sampling time parameter. By precisely controlling this time ratio parameter, the system achieves the optimal balance between pipeline purging effectiveness and sampling efficiency, ensuring gas environment stability without excessive purging time.
2Measurement precision
If the sampling frequency is increased to improve monitoring accuracy, then the contaminant detection precision improves, but the gas composition consistency deteriorates
Solution Approach 1:
The system uses periodic sampling at optimized intervals within the 1:5 cycle to achieve accurate contaminant detection without excessive frequency. This periodic approach maintains gas composition consistency by avoiding overly frequent sampling that would disrupt the gas environment, while still providing sufficient monitoring accuracy through strategically timed measurements.
Solution Approach 2:
The system performs preliminary purging action before each sampling event to ensure the pipeline is clean and ready for accurate measurement. This preliminary preparation prevents contamination from previous samples, ensuring measurement precision without requiring increased sampling frequency that would disrupt gas composition stability.
3Measurement precision
If the pipeline purging is performed more frequently to maintain cleanliness, then the measurement accuracy improves, but the time consumption increases
Solution Approach 1:
The system optimizes the purging time parameter to be exactly 1/5 of the sampling time, achieving the minimum effective purging duration needed for measurement accuracy. This parameter optimization ensures adequate pipeline cleanliness without excessive purging time, resolving the contradiction between measurement precision and time consumption.
Solution Approach 2:
The system applies partial purging action (1/5 of sampling time) which is sufficient to maintain measurement accuracy without performing excessive purging. This partial action approach achieves the necessary cleanliness level while minimizing time consumption, avoiding the waste of over-purging the pipeline.
Data Source
AI summary
Embodiments provide a system for monitoring an environment and a monitoring method based on a system for monitoring an environment. The system for monitoring the environment includes: a sampling device, configured to collect environmental samples from the process areas and including a system sampling pipeline, the environmental sample containing air; an analysis device, connected to an output end of the system sampling pipeline and configured to analyze the collected environmental samples; and an air supply device, connected to the system sampling pipeline and configured to provide a purge gas and purge the system sampling pipeline using the purge gas. In a period for a single sampling, a ratio between a time period for purging the system sampling pipeline using the air supply device and a time period for sampling by the sampling device is controlled to be 1:5.