Climate Chamber Temperature Stabilization With Fluid Heat Exchange
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Solution Overview
Problem
Microlithographic systems face challenges in maintaining stable temperature control due to fluctuations in clean-room temperatures, leading to thermal expansion or contraction of components, and existing solutions are inefficient, costly, and require extensive clean-room infrastructure.
Innovation Solution
A climate chamber system with a thermally conductive fluid reservoir and heat exchanging means outside the chamber, allowing for precise temperature control by transferring heat between the fluid and supplied gas before entering the chamber, using a thermally conductive fluid to stabilize the chamber atmosphere.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If long coils of tubing are used to transport air through the clean-room environment, then the air temperature can be sufficiently close to the climate chamber temperature, but the system becomes complex, costly, and vulnerable to ambient temperature fluctuations
Solution Approach 1:
The invention extracts the temperature control function from the air transport system and places it inside the climate chamber. Instead of tempering air externally through long tubing, a fluid reservoir with thermally conductive fluid is positioned inside the chamber to directly exchange heat with the enclosed atmosphere, eliminating the need for complex external air transport infrastructure
Solution Approach 2:
A thermally conductive fluid serves as an intermediary between the climate chamber atmosphere and external heat exchange means. The fluid absorbs or releases heat within the chamber and transfers it to/from external heat exchange means, decoupling the temperature control function from the air transport path and reducing vulnerability to ambient fluctuations
2Manufacturing precision
If the air supply is tempered externally before entering the climate chamber, then thermal expansion or contraction of masks can be minimized, but the system requires costly clean-room infrastructure and long distances of air transport
Solution Approach 1:
The temperature control function is extracted from external air supply systems and relocated to the interior of the climate chamber. A fluid reservoir containing thermally conductive fluid is positioned inside the chamber to directly exchange heat with the enclosed atmosphere, eliminating the need for costly external air transport infrastructure and clean-room dependencies
Solution Approach 2:
The climate chamber performs its own temperature control function through internal heat exchange. The fluid reservoir and thermally conductive fluid enable the chamber to self-regulate its atmospheric temperature without relying on external clean-room infrastructure, reducing implementation costs and simplifying the overall system
3Temperature
If exterior heater/cooler systems are used to control temperature, then temperature control can be achieved, but the control system becomes complex and requires additional components outside the chamber
Solution Approach 1:
A thermally conductive fluid acts as an intermediary between the climate chamber atmosphere and external heat exchange means. The fluid is contained in a reservoir inside the chamber and transfers heat to/from external heat exchange means, providing temperature control while simplifying the overall system architecture compared to direct exterior heater/cooler configurations
Solution Approach 2:
The invention uses a fluid-based thermal conduction system to transfer heat between the climate chamber atmosphere and external heat exchange means. The thermally conductive fluid in the reservoir provides efficient heat transfer with simplified control compared to mechanical heater/cooler systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces temperature fluctuations, improves energy efficiency, and allows for compact, cost-effective temperature management with minimal clean-room impact, maintaining a stable climate chamber environment.
Implementation Method 1
a fluid reservoir, which is arranged to accommodate a thermally conductive fluid and to be in thermal connection with the atmosphere to transfer heat between the atmosphere and the thermally conductive fluid
Implementation Method 2
a means for transporting the thermally conductive fluid between the fluid reservoir and the first heat exchanging means
Implementation Method 3
a first heat exchanging means arranged outside the climate chamber... The first heat exchanging means is configured to transfer heat between the thermally conductive fluid and the gas before the gas is supplied to the enclosed atmosphere
Data Source
AI summary
A microlithographic system, comprising: a climate chamber enclosing an atmosphere; a printing device for projection of an optical beam onto a photo-sensitive resist, the printing device being arranged in the climate chamber; a fluid reservoir arranged to accommodate a thermally conductive fluid and arranged to be in thermal connection with the atmosphere to transfer heat between the atmosphere and the thermally conductive fluid; a first heat exchanging means arranged outside the climate chamber; a means for transporting the thermally conductive fluid between the fluid reservoir and the first heat exchanging means; and a means for supplying a gas from outside the climate chamber to the enclosed atmosphere; wherein the first heat exchanging means is configured to transfer heat between the thermally conductive fluid and the gas before the gas is supplied to the enclosed atmosphere.