Clockable Pedestal Alignment Using Keyed Dowels and Slots
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional pedestals in substrate processing systems are difficult to install correctly, leading to misalignment and potential vibration or particle generation due to their interaction with moving components, which is time-consuming and error-prone.
Innovation Solution
A clockable pedestal with a baseplate, stem, and dowels that extend downward, featuring differently sized dowels and slots to ensure precise alignment and prevent incorrect installation, allowing for controlled positional tuning and adjustment within specific manufacturing tolerances.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional pedestals are installed using traditional alignment methods, then the pedestal can be installed, but the installation process is time-consuming and error-prone due to the need for multiple adjustments and re-clamping
Solution Approach 1:
The patent applies preliminary action by pre-configuring the pedestal with clocking features (alignment pins and corresponding slots) that establish the correct rotational position before the pedestal is fully installed. This preliminary alignment configuration eliminates the need for multiple adjustments during installation, directly resolving the contradiction by making the installation process both faster and more reliable.
2Productivity
If the pedestal is not properly aligned during installation, then installation can be completed quickly, but the pedestal may come in contact with moving components causing vibration and particle generation
Solution Approach 1:
The patent applies self-service through self-aligning features where the clocking mechanism (alignment pins fitting into slots) automatically guides the pedestal into the correct rotational position during installation. This self-alignment ensures proper positioning without requiring operator intervention or multiple adjustments, enabling quick installation while preventing contact with moving components and eliminating vibration and particle generation.
3Ease of operation
If traditional alignment methods are used, then the pedestal can be installed, but operators need to adjust and re-clamp the pedestal multiple times to achieve proper alignment
Solution Approach 1:
The clocking features are pre-configured on the pedestal before installation, establishing the correct rotational position in advance. This preliminary configuration allows the pedestal to be quickly aligned during installation without requiring multiple adjustments and re-clamping operations, directly addressing both the ease of operation and time loss issues.
4Manufacturing precision
If the pedestal is over-constrained during installation, then alignment precision can be achieved, but the installation process becomes more complex and time-consuming
Solution Approach 1:
The clocking features (alignment pins and slots) are pre-configured on the pedestal with specific geometries that inherently guide the pedestal into the correct rotational position. This preliminary configuration provides built-in alignment guidance that achieves precise alignment without requiring complex installation procedures or multiple adjustment steps, resolving the contradiction between precision and complexity.
Data Source
AI summary
A dockable pedestal configured to support a substrate in a processing station comprises a baseplate, a stem, and a plurality of dowels arranged around the stem. The plurality of dowels is configured to be inserted within designated receiving slots in a first surface of the processing station to reduce misalignment and promote proper tuning range of the dockable pedestal. At least one of the plurality of dowels has a diameter that is larger than the diameters of other dowels. The dowel with the larger diameter is configured to fit within only one of the designated receiving slots in the first surface of the processing station.