Closed-Loop DI Water Heating for Stable Semiconductor Flow
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Solution Overview
Problem
Current systems for heating ultra-pure deionized water in semiconductor manufacturing fail to maintain stability in temperature, pressure, and flow rate, leading to inefficiencies and waste, particularly due to the use of open-loop systems that expose water to the atmosphere and require frequent water replacement.
Innovation Solution
A closed-loop, recirculating heating system with multiple stages and a control system that maintains temperature, pressure, and flow rate, using thin film heating elements and a programmable logic controller to efficiently heat and recirculate ultra-pure deionized water, minimizing exposure to atmosphere and optimizing energy use.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If open-loop heating systems are used to heat ultra-pure deionized water, then heating capability is provided, but temperature and pressure stability deteriorates and water purity is compromised due to atmospheric exposure
Solution Approach 1:
The patent implements a closed-loop system that isolates ultra-pure deionized water from atmospheric exposure throughout the heating and distribution process. The system uses sealed piping and enclosures to create an inert environment, preventing contamination from air-borne particles and gases while maintaining temperature stability during heating operations.
Solution Approach 2:
The patent incorporates multiple sensors and control mechanisms that continuously monitor temperature, pressure, and flow rate parameters. This feedback system allows real-time adjustments to maintain stability within specified ranges, compensating for any deviations caused by changing flow conditions or environmental factors.
2Stability of the object's composition
If recirculating heating systems are implemented to improve temperature stability, then temperature control improves, but system complexity increases
Solution Approach 1:
The patent divides the heating system into distinct functional modules including a recirculating pump, heating element, temperature sensors, and control system. This segmentation allows each component to be optimized independently and facilitates easier maintenance and troubleshooting while achieving overall temperature stability.
Solution Approach 2:
The patent implements a continuous recirculating flow system where water constantly circulates through the heating element and process equipment. This continuous circulation ensures uniform temperature distribution and stability without requiring complex batch heating controls or multiple heating zones.
3Loss of substance
If frequent water replacement is performed to maintain purity in open-loop systems, then water purity is maintained, but water consumption and waste increase
Solution Approach 1:
The patent implements a closed-loop recirculating system that continuously recovers and reuses ultra-pure deionized water after it passes through process equipment. The system maintains purity through filtration and monitoring rather than disposal and replacement, dramatically reducing water consumption and waste while ensuring consistent purity levels.
Solution Approach 2:
The patent incorporates self-cleaning and self-monitoring capabilities into the recirculating system, including automated filtration and purity sensing. The system maintains its own water quality standards through continuous circulation and internal purification mechanisms without requiring external intervention or water replacement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides precise temperature control, reduces energy consumption, minimizes water waste, and maintains water purity, enhancing semiconductor manufacturing efficiency and yield while reducing capital and resource expenditure.
Implementation Method 1
using thin film heating elements and a programmable logic controller to efficiently heat and recirculate ultra-pure deionized water
Data Source
AI summary
Provided herein are heating systems for ultra-pure deionized water. One heating system is a closed loop, recirculating system that includes a first tank and a first stage heater and a second tank and a second stage heater. The first stage heater heats water from the first tank to a first temperature. Upon leaving the first stage heater, the water flows to the second tank. The second stage heater heats the water from the second tank to a second, final temperature. The water, at the second, final temperature, is sent through a closed loop recirculating system for the use in a manufacturing process such as semiconductor manufacturing.