Closed-Loop Temperature Control for Flammable Heat Transfer Fluids
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing systems use polyfluoroalkyl substances (PFAS) as heat transfer fluids, which are harmful to the environment and toxic to humans, and pose risks due to their flammability when exposed to air.
Innovation Solution
A closed loop system using a non-PFAS flammable or combustible heat transfer fluid, such as mineral oils or synthetic oils, is employed to regulate the temperature of process tools, with sensors and a controller to detect leaks and overheating conditions and trigger corrective actions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If PFAS is used as heat transfer fluid, then temperature control performance is improved, but environmental and health risks increase
Solution Approach 1:
The patent extracts and eliminates PFAS from the heat transfer fluid system, replacing it with alternative fluids that provide the necessary temperature control performance without the harmful environmental and health effects of PFAS
Solution Approach 2:
The patent changes the chemical composition parameters of the heat transfer fluid by substituting PFAS with alternative substances, thereby maintaining the functional parameters (temperature control) while improving the safety and environmental parameters
2Object-affected harmful factors
If flammable heat transfer fluid is used, then environmental risks are reduced, but fire safety risks increase when exposed to air
Solution Approach 1:
The patent implements an inert atmosphere (nitrogen or other inert gas) in the processing chamber to prevent flammable heat transfer fluid from contacting oxygen in air, thereby eliminating fire hazards while allowing the use of environmentally safer fluid alternatives
Solution Approach 2:
The patent removes oxygen (via inert gas purging) from the environment where flammable heat transfer fluid is present, extracting the harmful element that would enable combustion and thus ensuring safety
3Use of energy by moving object
If closed loop system is used, then power consumption is reduced, but leak detection complexity increases
Solution Approach 1:
The patent implements feedback mechanisms through sensors that continuously monitor the closed loop system for leaks, providing real-time data to the controller that triggers appropriate responses, thereby managing the complexity through systematic monitoring and control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces environmental and health risks associated with PFAS, minimizes power consumption due to reduced frictional losses in the closed loop, and ensures safe operation by preventing exposure of flammable fluids to air.
Implementation Method 1
fluid loops for heat transfer fluid flow to remove and/or add heat to the processing chambers
Implementation Method 2
The processing chambers include fluid loops for heat transfer fluid flow to remove and/or add heat to the processing chambers
Data Source
AI summary
A system includes a closed loop configured to flow a heat transfer fluid to regulate temperature of a process tool. The heat transfer fluid includes a flammable or combustible fluid. The system further includes a temperature control unit configured to receive the heat transfer fluid and regulate temperature of the heat transfer fluid. The system further includes a plurality of sensor configured to measure one or more properties of the heat transfer fluid. The system further includes a controller configured to determine a fault in the closed loop based on sensor data received from the plurality of sensors and to further cause a corrective action responsive to determining the fault.