Closed-Loop Pressure Regulation for Spike-Free Subatmospheric Delivery

Solution Overview

Problem

Existing subatmospheric pressure delivery systems experience pressure spikes at the ultimate delivery line due to unregulated mass gas flow, which is not effectively controlled by existing mechanical components.

Innovation Solution

A fluid supply system with a pressure regulator system and electromechanical valves controlled by pressure sensors and a gas flow control device, utilizing piezoelectric crystals and flexible membranes to stabilize delivery pressure through closed-loop feedback, ensuring subatmospheric and spike-free output.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If mechanical pressure sensing assembly components are used to regulate valve opening and closing, then valve control function is provided, but pressure spikes occur at the delivery line

Engineering Contradiction:

Improvevalve control functionVSAvoidpressure spikes

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent replaces traditional mechanical pressure sensing assemblies with an electromechanical valve system controlled by a pressure sensor and control algorithm. The pressure sensor detects delivery line pressure and feeds back to a controller that adjusts the electromechanical valve opening degree dynamically, eliminating the pressure spikes caused by mechanical assembly limitations while maintaining valve control functionality.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements a closed-loop feedback control system where a pressure sensor continuously monitors the delivery line pressure and sends signals to a controller. The controller adjusts the electromechanical valve opening degree based on the feedback pressure signals, creating a dynamic regulation mechanism that prevents pressure spikes and maintains stable subatmospheric pressure delivery.

Inventive Principle:

Principle #23Feedback

2Productivity

If unregulated mass gas flow is used, then gas delivery speed is high, but pressure spikes occur at the delivery line

Engineering Contradiction:

Improvegas delivery speedVSAvoidpressure spikes

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent transforms the static, unregulated gas flow into a dynamic, regulated flow system. The electromechanical valve's opening degree is continuously adjusted based on real-time pressure feedback, allowing the system to maintain high gas delivery speed while dynamically preventing pressure spikes through adaptive flow regulation.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent changes the flow regulation parameter from fixed mechanical positioning to dynamically variable electromechanical control. The valve opening degree becomes a controllable parameter that adjusts in real-time based on delivery line pressure conditions, enabling both high productivity and pressure spike prevention through parameter optimization.

Inventive Principle:

Principle #35Parameter changes

3Ease of operation

If mechanical pressure sensing assembly is used, then valve regulation is provided, but delivery pressure stability is poor

Engineering Contradiction:

Improvevalve regulationVSAvoiddelivery pressure stability

Core Design Contradiction:

Ease of operationVSStability of the object's composition

Solution Approach 1:

The patent implements a closed-loop feedback control system where a pressure sensor continuously monitors the delivery line pressure and sends signals to a controller. The controller adjusts the electromechanical valve opening degree based on the feedback pressure signals, creating a dynamic regulation mechanism that prevents pressure spikes and maintains stable subatmospheric pressure delivery.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent replaces traditional mechanical pressure sensing assemblies with an electromechanical valve system controlled by a pressure sensor and control algorithm. The pressure sensor detects delivery line pressure and feeds back to a controller that adjusts the electromechanical valve opening degree dynamically, eliminating the pressure spikes caused by mechanical assembly limitations while maintaining valve control functionality.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system maintains constant and stable subatmospheric pressure at the delivery line by dynamically controlling valve states based on real-time pressure feedback, preventing pressure spikes and ensuring consistent fluid delivery.

Implementation Method 1

the pressure sensor comprises a piezoelectric crystal, and the pressure-sensitive component is connected to the piezoelectric crystal such that movement or flexing of the pressure-sensitive component causes compression on the piezoelectric crystal to generate the variable control electric signal

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

the pressure-sensitive component includes a flexible membrane

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS12541214B2Pressure sensing and regulating system

Publication Date: 2026.02.03 ENTEGRIS INC

AI summary

A high pressure fluid storage device with a pressure sensing and regulating system configured for delivery of vaporized solid and liquid precursor materials at a regulated pressure range. At least some components of the pressure regulating system is contained internally within the storage device.