Transfer Chamber Sensor Layout for Closed-Port Microwave Leakage

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Solution Overview

Problem

Microwave leakage from a process chamber into a transfer chamber can cause electronic components in the transfer chamber to malfunction or be damaged, which existing substrate processing apparatuses fail to adequately prevent.

Innovation Solution

A substrate processing apparatus is designed with detection sensors placed around the loading/unloading ports in the transfer chamber to detect microwave leakage, ensuring the ports remain closed and preventing microwave entry, while the microwave generators are positioned to face the loading/unloading ports with the process chamber interposed, allowing for accurate detection and prevention of leakage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the loading/unloading port is kept closed to prevent microwave leakage, then the reliability of electronic components is improved, but the detection accuracy of microwave leakage is worsened due to limited access for sensors

Engineering Contradiction:

Improvereliability of electronic componentsVSAvoiddetection accuracy of microwave leakage

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The detection sensor is positioned in the transfer chamber rather than on the port structure itself, utilizing the three-dimensional space around the closed port to detect microwave leakage from multiple angles, thereby maintaining detection accuracy while keeping the port closed

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The closed loading/unloading port acts as an intermediary barrier that blocks direct microwave transmission while allowing the detection sensor to monitor for leakage through the closed structure, enabling both protection and detection functions simultaneously

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If the detection sensor is positioned close to the loading/unloading port to improve detection accuracy, then the measurement precision is improved, but the sensor becomes more vulnerable to microwave damage

Engineering Contradiction:

Improvedetection accuracy of microwave leakageVSAvoidmicrowave exposure to sensor

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The closed loading/unloading port serves as an intermediary barrier between the microwave source in the process chamber and the detection sensor in the transfer chamber, allowing the sensor to detect leakage from a safer distance while maintaining detection effectiveness

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The detection sensor provides feedback about microwave leakage conditions to the control system, which can then adjust the microwave generation or port operation to minimize sensor exposure while maintaining detection capability

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively prevents microwave leakage into the transfer chamber, improving detection accuracy and preventing component malfunction, thereby ensuring reliable substrate processing operations.

Implementation Method 1

a detection sensor provided in the transfer chamber adjacent to the loading/unloading port and configured to detect the microwave leaking to the transfer chamber from the process chamber

Methodology Applied

Scientific EffectMicrowave Radiation: Electromagnetic Induction

Data Source

PatentUS12255069B2Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Publication Date: 2025.03.18 KOKUSAI DENKI KK

AI summary

According to one aspect of the technique, there is provided a substrate processing apparatus including: a process housing including a process chamber in which a substrate is processed; a transfer housing provided adjacent to the process housing and having a transfer chamber wherein the substrate is transferred between the process chamber and the transfer chamber; a microwave generator configured to transmit a microwave to be supplied into the process chamber; a loading/unloading port connecting between the process chamber and the transfer chamber and through which the substrate is transferred; an opening/closing structure configured to open or close the loading/unloading port; and a detection sensor provided in the transfer chamber adjacent to the loading/unloading port and configured to detect the microwave leaking to the transfer chamber from the process chamber through the loading/unloading port while the opening/closing structure maintains the loading/unloading port closed.