Cluster Tool Swapper Assembly for Direct Substrate Transfer
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Solution Overview
Problem
There is a need in the art to directly transfer a substrate from a load lock to a processing chamber in cluster tools, and to operate multiple robotic mechanisms while reducing the number of motors.
Innovation Solution
A swapper assembly is introduced, which includes a housing, at least two swappers, and a motor assembly. The swappers are rotatable relative to the housing, and a single motor is configured to operate the swappers simultaneously, allowing for the direct transfer of substrates between load locks and processing chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If multiple robotic mechanisms are operated with separate motors, then each mechanism can be independently controlled, but the number of motors increases and operational efficiency decreases
Solution Approach 1:
The patent combines multiple robotic mechanisms into a single integrated robotic arm that can perform multiple substrate transfer operations. Instead of using separate motors for each robotic mechanism, one robotic arm with a unified control system replaces multiple independent mechanisms, thereby reducing the number of motors while maintaining operational capability.
Solution Approach 2:
The robotic arm is designed as a universal mechanism capable of performing multiple functions: transferring substrates between load locks and processing chambers, moving substrates between different chambers, and positioning substrates at various locations. This multi-functional design eliminates the need for dedicated robotic mechanisms for each transfer operation.
2Adaptability or versatility
If substrates are transferred through multiple intermediate steps, then flexibility in routing is improved, but transfer time increases and productivity decreases
Solution Approach 1:
The robotic arm is pre-positioned and pre-configured to execute multi-step transfer sequences without requiring intermediate stopping or repositioning. The system performs preliminary planning of the transfer path and executes continuous motion, eliminating delays associated with intermediate steps while maintaining routing flexibility.
Solution Approach 2:
The patent implements continuous substrate transfer operations where the robotic arm moves substrates along predefined paths without interruption. The unified robotic system maintains continuous motion between load locks and processing chambers, eliminating idle time and intermediate positioning operations that would otherwise break the continuity of useful action.
3Measurement precision
If multiple motors are used to operate robotic mechanisms, then each mechanism can be precisely controlled, but system reliability decreases due to more potential failure points
Solution Approach 1:
By consolidating multiple motors into a single robotic arm system with one primary drive mechanism, the patent reduces the number of potential failure points. The unified system has fewer moving parts and fewer motors that could fail, thereby improving overall system reliability while maintaining positioning accuracy through advanced control algorithms.
Solution Approach 2:
The robotic arm incorporates feedback mechanisms including sensors and control systems that continuously monitor position and adjust motion in real-time. This feedback control compensates for the reduction in physical motors by using intelligent control to maintain precise positioning, thereby achieving both high accuracy and improved reliability.
Data Source
AI summary
A swapper assembly of a cluster tool includes a housing, at least two swappers, and a motor assembly. The at least two swappers are at least partially disposed within and rotatable relative to the housing. Each swapper includes a body, a first arm, and a second arm. The first arm and second arm are rotatable relative to the body. The motor assembly includes at least one motor, and the motor assembly is configured to operate the at least two swappers simultaneously to change the position of the first arm and second arm.