Cluster Tool Fluid Deposition Autonomous Environment
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Solution Overview
Problem
Existing fluid deposition methods often require human operator involvement, exposing them to hazardous environments such as high temperatures and harmful fluids, and lack controlled conditions to prevent contamination and ensure safe operation.
Innovation Solution
A cluster tool system with a main chamber, load chamber, fluid deposition chamber, low and high temperature cure chambers, and an environmental controller that maintains a substantially autonomous environment, allowing for controlled fluid deposition and curing operations without direct human interaction, using a robot for substrate transfer and a gas purification system to control the chamber atmosphere.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If human operators directly perform fluid deposition operations, then operational flexibility and adaptability are improved, but operator safety deteriorates due to exposure to hazardous environments including high temperatures and harmful fluids
Solution Approach 1:
The system is divided into separate functional modules: a load chamber for substrate loading, a fluid deposition chamber for the actual deposition process, and a cure chamber for post-processing. A robotic system acts as an intermediary to transfer substrates between chambers, isolating human operators from hazardous environments while maintaining operational flexibility through automated control.
Solution Approach 2:
A robotic system serves as an intermediary between human operators and the hazardous fluid deposition environment. The robot performs substrate transfer and positioning tasks within the controlled chambers, allowing operators to control the process remotely without direct exposure to harmful fluids and high temperatures.
2Ease of operation
If human operators directly handle substrates in fluid deposition chambers, then ease of operation is improved, but contamination risk increases due to exposure to controlled environments
Solution Approach 1:
The chamber system separates substrate handling functions from the controlled deposition environment. The load chamber allows operators to load substrates without breaking the seal of the deposition chamber, while the robotic system handles all substrate manipulation within the controlled environment, minimizing contamination risk.
Solution Approach 2:
The robotic system autonomously performs substrate transfer, positioning, and handling tasks within the controlled chambers. This self-service capability eliminates the need for human operators to enter the controlled environment, thereby preventing contamination while maintaining operational efficiency.
3Manufacturing precision
If multiple processing operations are performed in separate chambers, then manufacturing precision is improved through controlled environments, but device complexity increases due to multiple chambers and robotic systems
Solution Approach 1:
The robotic system is designed with universal capabilities to perform multiple functions: substrate transfer between chambers, precise positioning within the deposition chamber, and coordination with different processing modes (fluid deposition, low-temperature cure, high-temperature cure). This multi-functionality reduces the need for separate specialized mechanisms for each operation.
Solution Approach 2:
Multiple processing functions (fluid deposition, low-temperature curing, high-temperature curing) are combined within a single integrated cluster tool system with a common robotic controller. The chambers are interconnected through a shared vacuum/pressure control system and gas purification system, reducing overall system complexity compared to completely separate processing equipment.
Data Source
Figure 1A
Figure 1B
Figure 1C
AI summary
A cluster tool (100) is described including a main chamber (102), a load chamber (106), a fluid deposition chamber (108) and an environmental controller (110). The load chamber (106) is coupled to the main chamber (102) and configured to receive one or more substrates. The fluid deposition chamber (108) is coupled to the main chamber (102) and includes a fluid deposition device (307) configured to deposit fluid onto the one or more substrates. A robot (104) is included in the main chamber (102), the robot (104) configured to transfer the one or more substrates between the load chamber (106) and the fluid deposition chamber (108). The environmental controller (110) is configured to maintain a substantially autonomous environment within the cluster tool (100).