Cluster Tool Lift Assembly for Fast Processing Station Exchange
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Solution Overview
Problem
Current maintenance systems for substrate processing systems are time-consuming, costly, and require significant downtime due to their limited reliability and large footprint, making them inefficient for performing preventative maintenance on processing chambers within cluster tools.
Innovation Solution
A lift assembly and method for removing and replacing processing stations, featuring support legs, a support bar, actuators, and a lift clasp, which allows for automated detachment of water, gas, and electrical connections, enabling faster and more efficient maintenance operations by isolating processing stations and reducing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If current maintenance systems are used for processing chambers, then maintenance can be performed, but maintenance time is excessive and tool downtime is significant
Solution Approach 1:
The processing chamber is divided into modular components that can be independently removed and maintained. The chamber module can be detached from the mainframe and handled as a separate unit, allowing maintenance operations to be performed on individual components without affecting the entire system.
Solution Approach 2:
A transfer chamber serves as an intermediary space between the mainframe and maintenance area. The chamber module is transferred through this intermediate space, allowing maintenance to be performed outside the main processing system while keeping other chambers operational.
2Reliability
If current maintenance systems are used for processing chambers, then maintenance can be performed, but tool downtime is significant
Solution Approach 1:
The system is segmented into independent chamber modules that can be maintained separately. This allows one chamber to be taken offline for maintenance while other chambers continue processing, maintaining overall tool productivity.
Solution Approach 2:
While one chamber module is being maintained, other chambers continue their processing operations uninterrupted. The modular design enables continuous useful action across the multi-chamber system, minimizing total downtime.
3Ease of repair
If processing stations are removed for maintenance, then preventative maintenance can be performed, but connection detachment is complex and time-consuming
Solution Approach 1:
Utility connections (water, gas, electrical) are extracted and provided through the transfer chamber infrastructure rather than being permanently attached to each chamber module. This allows connections to be easily disconnected and reconnected during maintenance operations.
Solution Approach 2:
The transfer chamber acts as an intermediary that provides utility connections to chamber modules during the transfer and maintenance process. Connections are made through this intermediate space, simplifying the detachment and reattachment process.
Data Source
AI summary
A method and apparatus for lifting a process station from a processing module is described herein. The apparatus includes a lift assembly disposed on the processing module, a lift cage, and one or more guide pins. The lift assembly is disposed to be capable of reaching each of the process stations disposed within the processing module. The lift assembly is used for replacement and maintenance of the process stations and further enables the automated removal and placement of the process stations within the processing module. Maintenance methods enabled by the lift assembly are additionally disclosed herein.