Cluster Tool Storage Load Lock Wafer Handling
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Solution Overview
Problem
Cluster tools experience inefficiencies in wafer processing due to idle processing chambers and exposure to ambient environments during wafer transfer, which limits throughput and increases contamination risks.
Innovation Solution
Incorporating a designated storage area within the cluster tool to temporarily hold wafers, allowing for flexible processing and reduced exposure to ambient environments, thereby optimizing wafer movement and minimizing idle time in processing chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If wafers are transferred between processing chambers using robot arms in a cluster tool, then contamination from ambient environment is reduced, but processing efficiency decreases due to idle processing chambers and limited throughput
Solution Approach 1:
The patent applies preliminary action by pre-loading multiple wafers into the transfer chamber before processing begins. This allows the processing chamber to immediately start processing without waiting for wafer transfer, eliminating idle time and improving throughput while maintaining contamination protection through the closed cluster tool environment.
Solution Approach 2:
The transfer chamber serves as an intermediary between the loading chamber and processing chamber. It temporarily stores multiple wafers and sequences their transfer to the processing chamber, allowing continuous processing without interruption while maintaining the closed environment that protects against contamination.
2Productivity
If multiple wafers are processed within a single cluster tool, then processing efficiency improves, but device complexity increases due to integrated robot arms and multiple chambers
Solution Approach 1:
The cluster tool is segmented into distinct functional chambers (loading chamber, transfer chamber, processing chamber) with dedicated functions. This segmentation allows each chamber to be optimized independently while working together as an integrated system, improving processing efficiency without overwhelming complexity.
Solution Approach 2:
The robot arm and transfer mechanisms are designed as universal components that can handle multiple wafers and operate across different chambers. This multi-functionality reduces the need for specialized components for each chamber, improving productivity while controlling overall system complexity.
Data Source
AI summary
The present disclosure relates to some embodiments of a method for improving processing efficiency of a cluster tool. The method comprises transferring a first lot of wafers from a transfer load lock to a designated storage load lock and transferring a second lot of wafers from the transfer load lock to the designated storage load lock while the first lot of wafers is in the transfer load lock or the designated storage load lock. The designated storage load lock has the same structure as the transfer load lock and respectively has an inner load lock portal at an interface with the first transfer chamber and an outer load lock portal on a sidewall of a front end interface. The inner load lock portal of the designated storage load lock is retained opened during processing. The outer load lock portal of the designated storage load lock is retained closed during processing.