Cluster Tool Swapper Assembly for Faster Substrate Centering
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Solution Overview
Problem
Conventional cluster tools face challenges in efficiently and rapidly transferring substrates from a load lock to a processing chamber, as they require multiple robotic movements to center and transfer each substrate, lengthening processing time.
Innovation Solution
The implementation of a cluster tool system that includes a swapper assembly with a swapper configured to swap substrates between processing chambers and load locks along a specific trajectory, utilizing a single motor assembly to operate multiple swappers simultaneously.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional robotic mechanisms are used to transfer substrates from load lock to processing chamber, then substrate transfer can be completed, but multiple robotic movements are required which lengthen processing time
Solution Approach 1:
The system divides substrate transfer operations into simultaneous independent transfers to multiple processing chambers. The robotic mechanism can transfer substrates to different chambers at the same time rather than sequentially, effectively segmenting the transfer process to reduce total time.
Solution Approach 2:
The robotic mechanism performs preliminary positioning and centering actions before substrate transfer. By pre-positioning substrates and preparing the robotic mechanism in advance, the actual transfer operation can be executed more rapidly without compromising precision.
2Manufacturing precision
If conventional robotic mechanisms center each substrate sequentially, then alignment precision is achieved, but the time required for centering operations increases
Solution Approach 1:
The system merges multiple centering operations into a single synchronized robotic action. By coordinating the robotic mechanism to center substrates for multiple chambers simultaneously, the total centering time is reduced while maintaining precision through coordinated control.
Solution Approach 2:
The patent replaces manual or sequential mechanical centering operations with an automated robotic system that uses sensors and controlled movements to achieve precise centering more rapidly. The robotic mechanism substitutes for traditional mechanical alignment methods.
3Adaptability or versatility
If multiple robotic movements are used to transfer substrates to different processing chambers, then all chambers can be served, but the complexity of robotic operations increases
Solution Approach 1:
The robotic mechanism is designed as a universal system capable of serving multiple processing chambers with different requirements. A single robotic mechanism performs multiple functions including substrate pickup, centering, and transfer to various chambers, reducing the need for separate mechanisms for each chamber.
Solution Approach 2:
The robotic mechanism employs dynamic control to adapt its movements and operations based on real-time conditions. By using sensors and feedback control, the system can dynamically adjust its transfer paths, speeds, and positioning to handle different substrate types and chamber requirements efficiently.
Data Source
AI summary
A cluster tool includes: a factory interface including a first robot with an end effector; a first processing mainframe coupled to the factory interface, including: a first processing chamber; a first load lock including a first opening facing the factory interface configured to receive the end effector of the first robot, the first load lock further including a first slit valve configured to selectively open and close the first opening; at least one first LCF sensor disposed between the factory interface and the first slit valve; and a swapper assembly disposed between the first load lock and the first processing chamber, wherein the swapper assembly includes a first swapper configured to swap substrates between the first processing chamber and the first load lock along a first trajectory.