Coordinate Measuring Machine Automatic Self-Calibration

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Solution Overview

Problem

Existing coordinate measuring machines lack an efficient method for automatic self-calibration, which is crucial for maintaining accuracy and reliability over time.

Innovation Solution

A coordinate measuring machine equipped with a means for automatically orienting substrates, a control and computing unit for self-calibration based on multiple orientations, a measurement table movable in X and Y directions, an illumination system, and a camera for measuring substrate edges, allowing for data set collection from different orientations to calibrate the machine.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Extent of automation

If manual calibration methods are used for coordinate measuring machines, then calibration can be performed, but the process requires significant manual intervention and time

Engineering Contradiction:
Improveautomatic self-calibrationVSAvoidcalibration system complexity
Core Design Contradiction:
Extent of automationVSDevice complexity

Solution Approach 1:

The coordinate measuring machine performs self-calibration automatically using its own measurement capabilities. The system measures structures on the substrate in multiple orientations and uses these measurements to calibrate itself without external intervention, making the calibration process self-service and highly automated

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system automatically orients the substrate in predetermined orientations (e.g., 0°, 45°, 90°, 135°) before measurement. This preliminary orientation setup enables the subsequent automatic calibration process to proceed systematically without manual intervention during the actual calibration execution

Inventive Principle:
Principle #10Preliminary action

2Reliability

If calibration is performed frequently to maintain accuracy, then measurement reliability improves, but time and productivity are reduced

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidcalibration time
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The system enables periodic calibration at scheduled intervals or after a predetermined number of measurements. The automatic self-calibration process can be triggered periodically without manual intervention, maintaining measurement reliability while minimizing impact on overall productivity through efficient automated execution

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent replaces manual mechanical calibration operations with an automated optical measurement and computation system. The coordinate measuring machine uses its camera and measurement software to automatically perform calibration calculations based on substrate structure measurements, eliminating time-consuming manual intervention

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If multiple orientations are used for calibration, then calibration accuracy improves, but the number of measurements and time required increases

Engineering Contradiction:
Improvecalibration precisionVSAvoidcalibration time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system dynamically adjusts the calibration process by measuring substrate structures in multiple orientations and automatically processing these measurements. The control and computing unit efficiently handles the data from different orientations to calculate calibration parameters, achieving high precision without proportional time increase through automated computation

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS8115808B2Coordinate measuring machine and method for calibrating the coordinate measuring machine
Publication Date: 2012.02.14 VISTEC SEMICON SYST
  • US8115808B2 patent drawing
  • US8115808B2 patent drawing
  • US8115808B2 patent drawing

AI summary

A coordinate measuring machine is disclosed having an orientor automatically orienting a substrate associated therewith. A control and computing unit is further associated with the coordinate measuring machine, so that self-calibration may be performed on the basis of at least two different and automatically set orientations of the substrate.