CMOS Image Sensor Stacked Transistor Architecture

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Solution Overview

Problem

The challenge in manufacturing high-quality CMOS image sensors is the difficulty in reducing the size of unit pixels while maintaining sensitivity due to the complexity of integrating transistors and wirings on light-sensitive areas, which can lead to noise and reduced signal-to-noise ratio.

Innovation Solution

The design incorporates pairs of photodiodes with a floating diffusion region, n-wells, and p-type impurity regions, along with transfer gates forming transfer transistors, and the use of transparent oxide semiconductor transistors for reset, source follower, and selection transistors, with carefully aligned output and power source lines to minimize noise and maximize signal transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If transistors and wirings are integrated on light receiving areas of photodiodes, then device functionality is improved, but noise increases and signal-to-noise ratio deteriorates

Engineering Contradiction:
Improvedevice functionalityVSAvoidnoise
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The patent moves transistors from the planar light receiving area to a vertical stacked configuration above the photodiode. This dimensional transition allows transistors to be positioned in the third dimension (vertical direction) rather than competing for two-dimensional planar space, eliminating the trade-off between functionality and noise.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a stacked sensor architecture where multiple components (photodiode, transfer transistor, reset transistor, source follower transistor) are nested vertically one above another. This nesting allows all necessary functional elements to be contained within a compact vertical column, maintaining full device functionality while keeping the light receiving area clear.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Productivity

If micro process is applied to reduce chip size, then productivity increases and unit cost decreases, but manufacturing high-quality sensors becomes difficult

Engineering Contradiction:
ImproveproductivityVSAvoidmanufacturing quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The stacked configuration utilizes the vertical dimension to accommodate all transistor components, allowing planar photodiode arrays to be manufactured with high precision using standard micro processes while adding functional complexity through vertical stacking. This separates the precision requirements of photodiode fabrication from transistor integration.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent divides the sensor into distinct functional layers stacked vertically: photodiode layer for light detection, transfer transistor layer for charge transfer, reset transistor layer for signal resetting, and source follower transistor layer for signal amplification. This segmentation allows each layer to be optimized and manufactured separately with appropriate precision requirements.

Inventive Principle:
Principle #1Segmentation

3Productivity

If unit pixel size is reduced, then more pixels per chip increase productivity, but sensitivity deteriorates

Engineering Contradiction:
Improvepixels per chipVSAvoidsensitivity
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

By moving transistors to the vertical dimension through stacking, the patent frees up planar space in each pixel, allowing the light receiving area to be maximized even as overall pixel density increases. This enables smaller pixels to maintain adequate photodiode area for sensitivity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The stacked configuration allows a single vertical column to contain multiple transistors that collectively provide all necessary functions (charge transfer, reset, amplification) that would otherwise require separate components. This multi-functionality within a compact vertical space enables higher pixel density without sacrificing per-pixel performance.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for a smaller pixel size without compromising sensitivity, enabling the production of high-quality CMOS image sensors with improved signal-to-noise ratio and reduced noise, while also allowing for miniaturization of camera modules.

Implementation Method 1

a plurality of photodiodes 102 formed on a substrate 101

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP2249384B1CMOS image sensor
Publication Date: 2019.04.10 SAMSUNG ELECTRONICS CO LTD
  • EP2249384B1 patent drawingFigure 1
  • EP2249384B1 patent drawingFigure 2A~2B
  • EP2249384B1 patent drawingFigure 3

AI summary

Provided is a complementary metal oxide semiconductor (CMOS) image sensor having a structure capable of increasing areas of photodiodes in unit pixels and expanding light receiving areas of the photodiodes. In the CMOS image sensor, transfer transistors may be formed on the photodiode, and reset transistors, source follower transistors, and selection transistors may be formed on a layer on which the transfer transistors are not formed. In such a CMOS image sensor, the areas of the photodiodes may be increased in unit pixels so that a size of the unit pixels may be reduced and sensitivity of the pixel may be improved.