CMOS Microneedle Structures for Neuron Sensing

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Solution Overview

Problem

Current micro-electrode arrays and microneedle technologies face challenges in efficiently measuring and stimulating small cells like mammalian neurons due to limited spacing and functionality, with existing microneedles being too large and lacking integration with sensing and actuation capabilities.

Innovation Solution

The development of CMOS-compatible electronic devices featuring microneedles with channels surrounded by insulating layers, allowing for integration with integrated circuitry and microfluidic channels, enabling both sensing and actuation functions, and capable of being used with small cells like neurons.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional micro-electrode arrays are used, then electrode fabrication is simple, but the spacing between electrodes is large (minimum 100 μm) and cannot achieve required small spacings (e.g., 6 μm)

Engineering Contradiction:
Improveelectrode spacingVSAvoidfabrication process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent transitions from planar 2D electrode arrays to 3D microneedle structures protruding from the substrate surface. This dimensional change enables much smaller spacing between electrodes (down to 6 μm) while maintaining manufacturability through standard CMOS processes, as the vertical protrusion allows independent positioning without increasing lateral fabrication complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The microneedle structure is segmented into distinct functional zones: the substrate layer, the microneedle protrusions, and the top electrode layer. This segmentation allows each layer to be optimized independently using standard CMOS fabrication steps, achieving high precision spacing without overwhelming process complexity

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If microneedles are made large for transdermal drug delivery, then drug delivery capability is achieved, but the needles cannot be used for in-vitro experiments on small cells

Engineering Contradiction:
Improveapplication rangeVSAvoidmicroneedle size
Core Design Contradiction:
Adaptability or versatilityVSLength of moving object

Solution Approach 1:

The patent enables continuous adjustment of microneedle dimensions (height, diameter, spacing) through CMOS fabrication parameters. This allows optimization for different applications: smaller needles (few micrometers) for in-vitro neuron experiments, or larger needles for in-vivo transdermal delivery, all using the same fabrication platform

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The CMOS-compatible microneedle platform is designed to be universally applicable across multiple domains. The same fabrication process can produce needles suited for in-vitro electrophysiology, in-vivo drug delivery, or combined functions, making the system adaptable rather than application-specific

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If existing microneedle fabrication methods are used, then microneedle structures can be created, but extra functionality cannot be provided on top of the needles

Engineering Contradiction:
Improvefunctional integrationVSAvoidfabrication simplicity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent merges microneedle fabrication with standard CMOS electronic device fabrication into a unified process. This allows multiple functionalities (electrodes, interconnects, passive components) to be integrated on the same substrate without requiring separate fabrication steps, maintaining ease of manufacture while enabling functional complexity

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The microneedle structure serves multiple functions simultaneously: mechanical penetration, electrical stimulation, and signal recording. The integration of electronic circuitry with the microneedles enables combined sensing and actuation capabilities, providing extra functionality without complicating the manufacturing approach

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Reliability

If one microneedle is attached to electronic circuitry using a probe arm, then electrical connection is achieved, but assembly is difficult and fixing is not straightforward

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidassembly ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent merges the microneedle and electronic circuitry into a single integrated device fabricated using the same CMOS process. This eliminates the need for separate probe arm assembly and fixing operations, as the electrical connections are formed during the standard fabrication process rather than through post-fabrication assembly

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent eliminates the probe arm intermediary component by directly integrating the microneedle with the electronic circuitry. The microneedle itself becomes the electrical conductor, removing the need for additional assembly steps and fixing mechanisms that complicate manufacturing

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentEP1967581B1CMOS compatible method for manufacturing microneedle structures
Publication Date: 2016.08.17 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • EP1967581B1 patent drawingFigure 1~2
  • EP1967581B1 patent drawingFigure 3~4
  • EP1967581B1 patent drawingFigure 5~6

AI summary

The present application describes an electronic device for sensing and/or actuating, comprising a substrate (1) containing CMOS electronics (2) and at least one microneedle (10), each of the microneedles (10) comprising at least one channel (7,8) surrounded by an insulating layer (6). Also described is a method for making such an electronic device. The device is especially intended for monitoring electrical activity, eg. action potentials, in small networks of neurons.