CMOS Sensor Array for Microscale Electrochemical Measurements

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Solution Overview

Problem

Capacitive sensing and electrochemical impedance spectroscopy (EIS) biosensors face challenges with low dynamic range and chemical specificity due to ion screening effects, and ion-sensitive field effect transistors (ISFETs) experience drift and flicker noise, limiting their effectiveness in long-duration applications such as cell culture monitoring.

Innovation Solution

A CMOS sensor array with a 64×64 pixel design using high-frequency impedance spectroscopy and code-division multiplexing, along with an in-pixel chopping circuit for ISFETs, to overcome ion screening and reduce noise, enabling extended integration times and improved sensing modalities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If EIS biosensors are used for miniaturized biochemical measurements, then low cost and simple instrumentation are achieved, but low dynamic range and low chemical specificity occur

Engineering Contradiction:
Improvelow cost and simple instrumentationVSAvoiddynamic range and chemical specificity
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent segments the sensing function into multiple frequency domains by applying impedance spectroscopy across a broad frequency range (e.g., 1 Hz to 10 MHz). Each frequency provides complementary information about different electrochemical processes, effectively segmenting the measurement to overcome the limited dynamic range of single-frequency EIS while maintaining the simplicity of the basic sensor structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent adds the frequency dimension to the traditional single-point EIS measurement. By measuring impedance across multiple frequencies simultaneously, the system transforms a one-dimensional measurement (single impedance value) into a multi-dimensional spectral signature that provides both enhanced dynamic range and chemical specificity without increasing physical sensor complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If ISFETs are used for cell culture monitoring, then integrated circuit technology and scaling are achieved, but drift and flicker noise increase

Engineering Contradiction:
Improvehigh throughput and scaling capabilityVSAvoiddrift and flicker noise
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent applies periodic modulation of the ISFET gate voltage at high frequencies (e.g., AC coupling or chopper stabilization techniques). This periodic action shifts the operating point away from the low-frequency region where flicker noise dominates, effectively reducing 1/f noise while maintaining the ability to perform long-duration cell culture monitoring with high throughput arrays.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent replaces direct DC measurement of ISFET output with high-frequency AC impedance spectroscopy. By substituting the measurement mechanism from direct voltage reading to frequency-domain impedance analysis, the system eliminates low-frequency drift and flicker noise while preserving the scalability and integration benefits of ISFET arrays.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Area of moving object

If ion screening effects are present in EIS measurements, then miniaturized sensing is enabled, but chemical specificity is reduced

Engineering Contradiction:
Improveminiaturized sensor areaVSAvoidchemical specificity
Core Design Contradiction:
Area of moving objectVSMeasurement precision

Solution Approach 1:

The patent compensates for ion screening effects by adding the frequency dimension to the measurement. Different frequencies probe different depths and ranges of the electric field, allowing the system to overcome the limited penetration depth caused by ion screening in miniaturized sensors. The frequency-resolved impedance spectrum provides chemical specificity that would be lost in single-frequency measurements at the microscale.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the dynamic range and chemical specificity of EIS biosensors and reduces drift and flicker noise in ISFETs, allowing for more accurate and stable measurements in cell culture monitoring and other applications.

Implementation Method 1

non-overlapping clocks configured to rapidly charge and discharge the exposed surface electrode

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

the ion-sensitive field effect transistor (ISFET) has cemented an important commercial role

Methodology Applied
Scientific EffectIon-sensitive field effect: Electric Field

Data Source

PatentUS20220214304A1Integrated platforms for microscale spatially-resolved electrochemical measurements
Publication Date: 2022.07.07 BROWN UNIVERSITY
  • US20220214304A1 patent drawing
  • US20220214304A1 patent drawing
  • US20220214304A1 patent drawing

AI summary

A complementary metal-oxide-semiconductor sensor array includes an active sensing area of pixels arranged in an array with a pitch, each pixel including an exposed surface electrode alongside switches and logic gates, and non-overlapping clocks configured to rapidly charge and discharge the exposed surface electrode, wherein control signals steer a switched output current between shared column outputs.