CMOS Image Sensor EO Film for Microlens Misalignment Compensation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

CMOS image sensors face issues with reduced quantum efficiency (QE) due to improper dimensions or misalignment of microlenses, leading to crosstalk and decreased image accuracy, as they fail to effectively focus incident light onto the photodiodes.

Innovation Solution

Incorporation of an electro-optical (EO) film with adjustable refractive index, which adjusts the light propagation path to compensate for manufacturing errors and misalignment, combined with a layered structure of color filters and transparent conductive materials to optimize light focusing for different wavelengths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If microlenses are used to focus incident light onto photodiodes, then light focusing capability is improved, but manufacturing precision deteriorates due to improper dimensions or misalignment

Engineering Contradiction:
Improvelight focusing capabilityVSAvoidmicrolens alignment precision
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

The patent introduces an electro-optical film with adjustable refractive index that can dynamically change its optical properties in response to applied electrical fields. This allows the light focusing characteristics to be adjusted after manufacturing, compensating for microlens misalignment or dimensional errors without requiring perfect manufacturing precision.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the refractive index parameter of the electro-optical film through applied electrical fields to adjust light propagation paths. By varying this physical parameter, the system compensates for manufacturing errors in microlens dimensions and alignment, maintaining effective light focusing capability.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If electro-optical film with adjustable refractive index is incorporated, then quantum efficiency is improved, but device complexity increases

Engineering Contradiction:
Improvequantum efficiencyVSAvoidlayered structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The electro-optical film serves multiple functions: it acts as both a light propagation medium and an active compensation element for manufacturing errors. Additionally, the transparent conductive layers serve dual purposes of electrical connection and optical transparency, reducing the need for separate components and mitigating the complexity increase.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If EO film adjusts light propagation path to compensate for manufacturing errors, then image accuracy is improved, but device complexity increases

Engineering Contradiction:
Improveimage accuracyVSAvoidcompensation mechanism complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The electro-optical film acts as an intermediary element between the microlens array and the photodiodes. It mediates the light propagation path and provides compensation for manufacturing errors without requiring direct adjustment of the microlenses or photodiodes, thereby improving image accuracy while maintaining relatively simple device architecture.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The EO film enhances QE to greater than 40% and reduces crosstalk by allowing precise adjustment of focal points for each pixel, improving image accuracy and precision.

Implementation Method 1

an electro-optical (EO) film between the color filter and the microlens, wherein a material of the EO film is configured to change refractive index in response to application of an electrical field

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 2

A CMOS image sensor utilizes light-sensitive CMOS circuitry to convert photons into electrons

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS12183753B2Image sensor and method of making
Publication Date: 2024.12.31 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12183753B2 patent drawing
  • US12183753B2 patent drawing
  • US12183753B2 patent drawing

AI summary

An image sensor includes a first photodiode and a second photodiode. The image sensor further includes a first color filter over the first photodiode; and a second color filter over the second photodiode. The image sensor further includes a first microlens over the first color filter and a second microlens over the second color filter. The image sensor further includes a first electro-optical (EO) film between the first color filter and the first microlens, wherein a material of the first EO film is configured to change refractive index in response to application of an electrical field. The image sensor further includes a second EO film between the second color filter and the second microlens, wherein a material of the second EO film is configured to change refractive index in response to application of an electrical field.