CMOS Sensor Array Offset Reduction via Segmentation

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Solution Overview

Problem

CMOS sensors face limitations in absolute accuracy due to sensitivity to packaging and fabrication processes, particularly non-uniform mechanical stress gradients, which current mitigation techniques struggle to address effectively without increasing costs.

Innovation Solution

A CMOS sensor system with a substrate featuring a sensor array and switches to establish different state conditions for each sensor element, allowing for the calculation of offsets and generation of a sensor system output, which includes a processor and memory to execute command instructions for data storage and offset calculation, thereby improving accuracy through adaptive calibration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional CMOS processes and packaging technologies are used, then manufacturing cost is reduced and ease of manufacture is improved, but measurement precision and manufacturing precision deteriorate due to non-uniform mechanical stress gradients

Engineering Contradiction:
Improveease of manufactureVSAvoidmeasurement precision
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The sensor substrate is divided into multiple sensor elements arranged in an array, where each element experiences different mechanical stress due to non-uniform gradients. By segmenting the sensor into many individual elements, the patent enables statistical averaging and offset cancellation techniques that improve measurement precision while maintaining compatibility with conventional CMOS manufacturing processes

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs offset characterization and calibration measurements before final sensor operation. By pre-measuring and storing offset values for each sensor element in a lookup table, the system eliminates the need for complex real-time compensation circuits, thereby maintaining manufacturing simplicity while improving measurement precision through preliminary calibration actions

Inventive Principle:
Principle #10Preliminary action

2Measurement precision

If layout techniques with multiple devices and dummy devices are used, then measurement precision is improved through error cancellation, but device complexity increases

Engineering Contradiction:
Improvemeasurement precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent employs sensor elements that are identical in structure and function, allowing each element to serve as both a measurement device and a reference for offset cancellation. The uniform design of all sensor elements enables them to mutually compensate for stress-induced offsets through statistical averaging, eliminating the need for complex dummy devices or asymmetric layouts while maintaining measurement precision

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent combines multiple identical sensor elements into an array configuration where their outputs are processed together. By merging the measurements from multiple elements and applying offset cancellation algorithms, the system achieves improved precision without increasing individual device complexity, as all elements share the same simple CMOS structure

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If spinning current technique is used to cancel offset errors, then measurement precision is improved, but device complexity and manufacturing cost increase due to additional front-end electronics

Engineering Contradiction:
Improvemeasurement precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical spinning current switching circuits with a simpler digital processing approach. Instead of physically spinning current through complex switch matrices, the system uses identical sensor elements with opposite polarity responses and applies digital offset cancellation through lookup tables and processing algorithms, thereby reducing device complexity while maintaining measurement precision

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent creates multiple copies of identical sensor elements with opposite polarity characteristics. These copied elements respond oppositely to the same magnetic field, allowing their outputs to be combined and offset errors to be cancelled through digital processing. This copying approach eliminates the need for complex spinning current hardware while achieving the same precision benefits

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces offset errors by four orders of magnitude, enhancing the accuracy of CMOS sensors without significant cost increases, as demonstrated by the comparison of traditional and proposed methods in sensor array outputs.

Implementation Method 1

the offset in Hall sensors is influenced by the piezoresistance effect. The piezoresistance effect results from the mechanical stress on the chip

Methodology Applied
Scientific EffectPiezoresistance effect: Piezoresistive Effect

Data Source

PatentUS9274179B2Integrated sensor array with offset reduction
Publication Date: 2016.03.01 ROBERT BOSCH GMBH
  • US9274179B2 patent drawing
  • US9274179B2 patent drawing
  • US9274179B2 patent drawing

AI summary

A method and system for providing increased accuracy in a CMOS sensor system in one embodiment includes a plurality of sensor elements having a first terminal and a second terminal on a complementary metal oxide semiconductor substrate, a first plurality of switches configured to selectively connect the first terminal to a power source and to selectively connect the first terminal to a readout circuit, and a second plurality of switches configured to selectively connect the second terminal to the power source and to selectively connect the second terminal to the readout circuit.