CMOS Image Sensor Trench Layout for Dark Current and Pixel Charge

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Solution Overview

Problem

Conventional solid-state imaging devices face issues with weakened silicon substrate pinning, leading to deteriorated Dark characteristics and dark current generation, as well as limited flexibility in transistor arrangement due to the formation of strong electric field regions.

Innovation Solution

A solid-state imaging device design where a P-type region is not formed or is thinly formed on parts of the sidewall surrounding the photoelectric conversion unit, creating a region without a strong electric field, thereby preventing charge pinning and allowing for increased transistor arrangement flexibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a P-type diffusion layer and an N-type diffusion layer are formed on the sidewall of a trench to form a strong electric field region, then the saturated electric charge amount Qs of each pixel is improved, but the pinning of the silicon substrate is weakened causing dark current generation and deteriorated Dark characteristics

Engineering Contradiction:
Improvesaturated electric charge amountVSAvoidDark characteristics
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent divides the trench structure into multiple segments: a first trench with P-type and N-type diffusion layers for charge storage, and a second trench without these layers for maintaining substrate pinning. This segmentation allows different regions to serve different functions - one for increasing saturated charge capacity and another for preserving Dark characteristics by preventing dark current generation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different structural qualities to different locations: the first trench region has P-type and N-type diffusion layers to create strong electric fields for charge accumulation, while the second trench region lacks these layers to maintain substrate pinning and prevent dark current. This local differentiation resolves the contradiction by optimizing each region for its specific function.

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If a strong electric field region is formed on the sidewall of the trench, then the saturated electric charge amount Qs is improved, but the region where transistors can be arranged is limited

Engineering Contradiction:
Improvesaturated electric charge amountVSAvoidtransistor arrangement region
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent segments the pixel structure into distinct functional zones: charge storage regions with strong electric fields formed in first trenches, and transistor arrangement regions associated with second trenches that lack these electric field-forming layers. This spatial segmentation allows transistors to be positioned in areas where they will not interfere with charge storage while still benefiting from the increased saturated charge capacity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes vertical dimensionality by forming trenches that extend into the substrate, creating strong electric fields in the vertical direction within specific trench regions. This allows charge storage functionality to be achieved in the depth dimension rather than competing for horizontal planar space, thereby preserving area for transistor arrangement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design prevents charge flow into the photodiode, improves Dark characteristics, and enhances the degree of freedom in arranging transistors, leading to better imaging performance.

Implementation Method 1

a PN junction region configured by a P-type region and an N-type region on a sidewall of the trench, in which a part of sides surrounding the photoelectric conversion unit includes a region where the P-type region is not formed or a region where the P-type region is thinly formed

Methodology Applied
Scientific EffectPN junction:

Implementation Method 2

form a strong electric field region and hold electric charges in the strong electric field region

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 3

a photoelectric conversion unit configured to perform photoelectric conversion

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS11769774B2Solid-state imaging device and electronic device
Publication Date: 2023.09.26 SONY SEMICON SOLUTIONS CORP
  • US11769774B2 patent drawing
  • US11769774B2 patent drawing
  • US11769774B2 patent drawing

AI summary

The present technology relates to a solid-state imaging device and an electronic device for increasing the degree of freedom regarding arrangement of transistors. Provided are a photoelectric conversion unit, a trench penetrating a semiconductor substrate in a depth direction and formed between the photoelectric conversion units respectively formed in adjacent pixels, and a PN junction region configured by a P-type region and an N-type region on a sidewall of the trench, in which a part of sides surrounding the photoelectric conversion unit includes a region where the P-type region is not formed or a region where the P-type region is thinly formed. The PN junction region is formed on at least one side of four sides surrounding the photoelectric conversion unit, and the P-type region is not formed on the remaining sides. The present technology can be applied to, for example, a back-illuminated-type CMOS image sensor.