CMOS Process Skew Sensor for SoC Yield

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Solution Overview

Problem

System on a chip (SoC) devices face high defect density due to their dense layout, which affects their operating functionality and yield, necessitating effective process variation detection to improve power, performance, and area (PPA) efficiency.

Innovation Solution

Incorporating process skew sensors within the SoC circuitry to detect and analyze global CMOS process variations by comparing the strength of PMOS and NMOS device drive currents, utilizing converter circuitry, process detector circuitry, and comparator circuitry to generate output signals indicative of silicon process skew.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If SoC devices use a dense layout to integrate more components on a single chip, then area efficiency is improved, but defect density increases and manufacturing precision deteriorates

Engineering Contradiction:
Improvearea efficiencyVSAvoiddefect density
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by incorporating process skew sensors into the SoC design before manufacturing. These sensors pre-detect process variations at the silicon level, allowing the system to compensate for manufacturing imperfections that inevitably occur in dense layouts. The sensors are built-in during fabrication, enabling early detection of PMOS/NMOS skew before the device is deployed, thus mitigating the impact of high defect density inherent in dense SoC layouts.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If process skew sensors are incorporated to detect process variations, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improveprocess variation detectionVSAvoidcircuitry complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The process skew sensor circuitry is designed to be multi-functional, serving both as a detection mechanism for process variations and as part of the overall SoC operational infrastructure. The same sensor circuitry that detects PMOS/NMOS skew can also provide data for adaptive voltage scaling, frequency adjustment, and other performance optimization functions. This universal approach allows a single added component to address multiple concerns, reducing the net increase in device complexity while maintaining improved manufacturing precision detection.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS10571516B2CMOS process skew sensor
Publication Date: 2020.02.25 ARM LTD
  • US10571516B2 patent drawing
  • US10571516B2 patent drawing
  • US10571516B2 patent drawing

AI summary

Various implementations described herein are directed to an integrated circuit. The integrated circuit may include converter circuitry that operates to provide a drive current. The integrated circuit may include process detector circuitry having multiple drive strength devices that are driven by the drive current from the converter circuitry. The multiple drive strength devices may provide multiple drive strength signals based on the drive current. The integrated circuit may include comparator circuitry having a comparator that receives the multiple drive strength signals from the multiple drive strength devices, detects a voltage difference between the multiple drive strength signals, and provides an output signal based on the detected voltage difference.