Corrosion-Resistant CMP Conditioner with Fluorinated Nanocomposite Coating
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Solution Overview
Problem
CMP conditioners based on stainless steel substrates are susceptible to corrosion in harsh environments, leading to premature failure and potential wafer contamination due to chemical attacks from acidic slurries.
Innovation Solution
Development of CMP conditioning tools with abrasive grains coupled to a substrate via a metal bond and coated with a fluorinated nanocomposite coating, such as a diamond-like carbon or fluorinated nanocomposite coating, which provides corrosion-resistant properties and minimizes metal contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If stainless steel substrates are used for CMP conditioners, then the tool provides necessary mechanical strength and structural integrity, but the tool becomes susceptible to corrosion in harsh environments leading to premature failure
Solution Approach 1:
The patent applies composite materials by combining stainless steel substrate with corrosion-resistant coating layers. The base stainless steel provides mechanical strength while the coating layer (comprising corrosion-resistant materials) provides chemical resistance against acidic slurries, creating a composite structure that achieves both strength and corrosion resistance simultaneously.
Solution Approach 2:
The corrosion-resistant coating acts as an intermediary barrier between the stainless steel substrate and the corrosive acidic slurry environment. This intermediate layer prevents direct chemical contact between the substrate and corrosive agents, thereby protecting the underlying metal from corrosion while allowing the tool to maintain its mechanical properties.
2Ease of manufacture
If brazing or powder metal sintering is used to manufacture conditioners, then the tool can be fabricated with abrasive particles, but the bonding system is susceptible to chemical attacks leading to porous microstructure and accelerated corrosion
Solution Approach 1:
The corrosion-resistant coating serves as a protective intermediary layer that shields the brazed or sintered bonding system from direct exposure to acidic slurries. This coating prevents chemical attacks on the porous microstructure created by brazing or sintering, thereby eliminating the accelerated corrosion that would otherwise occur while maintaining the fabrication capabilities of these methods.
Solution Approach 2:
By applying a corrosion-resistant coating before the tool is exposed to corrosive environments, the patent implements preliminary protective action. This pre-applied coating layer anticipates and prevents chemical attacks on the bonding system, stopping corrosion before it can penetrate through the porous microstructure and cause premature failure.
3Ease of operation
If metal bond is used to fix abrasive particles to substrate, then the tool surface can condition polishing pads effectively, but metal leaching occurs in acidic slurries causing wafer contamination
Solution Approach 1:
The corrosion-resistant coating acts as an intermediary barrier between the metal bond layer and the acidic slurry. This intermediate coating prevents metal ions from leaching into the slurry while still allowing the abrasive particles to effectively condition the polishing pad through mechanical action, thereby eliminating contamination while maintaining conditioning effectiveness.
Solution Approach 2:
The patent extracts or removes the harmful metal leaching problem by introducing a corrosion-resistant coating layer that physically separates the metal bond system from the corrosive environment. This extraction of the metal-surry direct contact eliminates the source of contamination while preserving the functional metal bond's ability to hold abrasive particles for effective conditioning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coated tools effectively resist corrosion and erosion, maintaining performance and reducing metal contamination in CMP processes, especially in harsh environments like tungsten or copper CMP applications, thereby extending tool life and ensuring wafer quality.
Implementation Method 1
the coating has corrosion-resistant properties
Implementation Method 2
the coating is hydrophobic
Implementation Method 3
resist corrosion and erosion, maintaining performance and reducing metal contamination
Data Source
AI summary
An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.