CMP Conditioning Disc Dual-Layer Brazing for Diamond Uniformity
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Solution Overview
Problem
Conventional CMP pad conditioners face issues with irregular diamond arrangement due to distortion during the brazing process, leading to uneven polishing and reduced pad life.
Innovation Solution
A CMP conditioning disc with a shank base and two forming layers, where diamonds are uniformly arranged in the X, Y, and Z directions through a primary and secondary forming process, ensuring consistent diamond positioning and reduced wear.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If diamonds are set on the shank using conventional brazing process, then diamonds can be fixed on the shank base, but the positions and postures of the diamonds become distorted and arranged irregularly due to liquidification during heat treatment
Solution Approach 1:
The brazing process is divided into two separate stages: first brazing the diamonds to the shank base, then second brazing the formed layer. This segmentation allows the diamonds to be initially positioned and fixed, then the forming layer is applied and brazed separately, preventing distortion of diamond positions and postures while achieving uniform arrangement.
Solution Approach 2:
The diamonds are preliminarily positioned and fixed to the shank base before the forming layer is applied. This preliminary action ensures that diamonds are correctly positioned before the brazing process completes, preventing distortion and ensuring uniform arrangement in the final product.
2Manufacturing precision
If a single forming layer is used to hold diamonds, then the structure is simpler, but the diamonds cannot be uniformly arranged in X, Y, and Z directions
Solution Approach 1:
The forming layer is divided into two distinct layers: a first forming layer that provides initial support and positioning, and a second forming layer that completes the uniform arrangement in three dimensions. This segmentation enables precise control of diamond positions in X, Y, and Z directions while maintaining a manageable structural complexity through systematic layering.
Solution Approach 2:
The dual forming layer structure adds a dimensional aspect to diamond positioning, allowing uniform arrangement to be achieved across three dimensions (X, Y, Z) by distributing positioning functions across two layers, with each layer contributing to specific dimensional control.
3Ease of manufacture
If diamonds are arranged irregularly on the shank, then the manufacturing process is simpler, but the pad conditioning effectiveness is reduced and diamond wear increases
Solution Approach 1:
The diamonds are preliminarily positioned in their final uniform arrangement before the complete brazing process. This preliminary positioning ensures that the uniform arrangement is established early, maintaining conditioning effectiveness and reducing diamond wear, while the brazing process simply secures this pre-established arrangement without requiring complex real-time adjustment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves effective pad conditioning, reduces diamond wear, improves pad cut rate (PCR), and extends the life of the CMP conditioning disc by maintaining uniform diamond arrangement and positioning.
Implementation Method 1
a primary metal powder layer forming step of providing a primary metal powder layer on the outer surface of the shank base and pre-sintering the primary metal powder layer
Implementation Method 2
an adhesive layer forming step of forming an adhesive layer on an outer surface of the primary metal powder layer; and a primary diamond fixing step of temporarily fixing the diamonds to an outer surface of the adhesive layer
Implementation Method 3
a secondary metal powder layer forming step of pre-sintering a secondary metal powder layer on the outer surface of the primary forming layer to form a secondary forming layer
Implementation Method 4
the secondary forming layer forming step involves forming the secondary forming layer through a brazing process
Data Source
AI summary
A method of manufacturing a CMP conditioning disc, includes: a primary forming layer forming step of forming a primary forming layer on an outer surface of a shank base and arranging a plurality of diamonds on the primary forming layer; and a secondary forming layer forming step of forming a secondary forming layer on an upper surface of the primary forming layer and exposing at least a portion of the diamonds in the secondary forming layer.