CMP Conditioning Disk Diamond Orientation Control
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Solution Overview
Problem
Existing CMP conditioning disks face issues with uneven diamond orientation, leading to random diamond fixation on the disk surface, which affects the polishing pad's wear resistance and grinding performance.
Innovation Solution
A CMP conditioning disk manufacturing device and method that utilize a diamond jig with a jig pocket to precisely control the orientation of diamonds, allowing for adjustable diamond positioning on the shank base, thereby enhancing pad polishing characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If diamonds are fixed using conventional methods through holes in an etched mask substrate with adhesive sprayed on metal powder layer, then the diamond setting process is simple and fast, but the diamond orientation becomes random and uncontrolled
Solution Approach 1:
The patent introduces a jig as an intermediary tool with pre-formed holes of specific shapes and orientations. This jig serves as a mediator between the diamond and the final positioning structure, allowing diamonds to be seated in controlled orientations before being transferred to the etched mask substrate. The jig's hole geometry directly determines the diamond orientation, providing precision without requiring complex alignment procedures during the actual setting process.
Solution Approach 2:
The patent prepares the jig with pre-formed holes of specific shapes and orientations before the diamond setting process. This preliminary preparation of the jig allows for controlled diamond orientation to be established in advance, so that when diamonds are seated in the jig holes and subsequently transferred to the substrate, their orientations are already determined and controlled, eliminating the need for complex real-time alignment.
2Reliability
If diamonds are fixed in random orientation on the disk surface, then the manufacturing process is simpler and faster, but the wear resistance and grinding performance of the polishing pad deteriorates
Solution Approach 1:
The jig acts as an intermediary that pre-organizes diamonds in the desired orientations before they are transferred to the conditioning disk. By controlling the hole geometry and orientation in the jig, the system ensures that diamonds are positioned with correct orientation relative to the polishing pad's movement direction, thereby improving wear resistance and grinding performance without significantly impacting production efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise control over diamond orientation, resulting in improved wear resistance and grinding performance of the polishing pad, with the ability to customize pad polishing characteristics based on diamond shape and characteristics.
Implementation Method 1
a suction unit configured to selectively apply suction force to the jig pocket
Implementation Method 2
a vibration unit that vibrates the diamond jig to guide the diamond to the jig pocket when the suction unit applies suction force to the jig pocket
Data Source
AI summary
A CMP conditioning disk manufacturing device includes: a diamond jig providing a jig pocket in which a diamond is seated; a suction unit configured to selectively apply suction force to the jig pocket; and a moving unit that fixes the diamond seated in the jig pocket to a shank base. The suction unit provides the jig pocket with a suction force when the diamond is seated in the jig pocket, and removes the suction force when the diamond is fixed to the shank base.