CMP Pad Conditioning Head With Universal Joint Balance Control
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Solution Overview
Problem
The existing conditioning apparatus for CMP pads experiences tilting and uneven wear due to frictional contact, leading to scratches and fatigue failure, and is prone to a perturbation phenomenon during the polishing process.
Innovation Solution
A conditioning apparatus with a gimbaling part, a universal joint, and a load applying unit that separates the center of gravity of the rotation driving unit from the gimbaling part, using pneumatic pressure to maintain balance and reduce frictional moments, thereby minimizing perturbations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If pneumatic pressure is used to compensate for lifting of the abrasive disc, then the abrasive disc is maintained in a balanced state, but a perturbation phenomenon occurs
Solution Approach 1:
A universal joint is introduced as an intermediary component between the rotation driving unit and the gimbaling part. This universal joint serves as a mediator that transmits rotational force while accommodating angular misalignments and separating the center of gravity of the rotation driving unit from the center of gravity of the gimbaling part, thereby eliminating the perturbation phenomenon caused by direct pneumatic pressure application
2Productivity
If frictional contact occurs between CMP pads and abrasive disc, then the abrasive disc sweeps over the CMP pads to regenerate them, but tilting of the abrasive disc occurs causing scratches and uneven wear
Solution Approach 1:
The gimbaling part functions as a counterbalancing mechanism that compensates for tilting forces generated during frictional contact between the CMP pads and abrasive disc. By allowing controlled angular movement and maintaining gravitational balance, the gimbaling part prevents the abrasive disc from tilting, thereby avoiding scratches and uneven wear on the CMP pads while preserving regeneration effectiveness
3Reliability
If the center of gravity of rotation driving unit is separated from the center of gravity of gimbaling part, then perturbation is reduced, but device complexity increases
Solution Approach 1:
The universal joint performs multiple functions simultaneously: it transmits rotational force from the rotation driving unit, accommodates angular misalignments, separates the center of gravity of the rotation driving unit from the center of gravity of the gimbaling part, and eliminates perturbation phenomena. This multi-functionality achieves perturbation reduction without proportionally increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the occurrence of perturbations, leading to improved CMP pad performance, increased pad and disc lifetimes, and enhanced process control, allowing for more efficient polishing.
Implementation Method 1
frictional contact between the CMP pads and the abrasive disc
Implementation Method 2
separates a center of gravity of the rotation driving unit from a center of gravity of the gimbaling part
Implementation Method 3
compensating for lifting of the abrasive disc caused by frictional contact and sweep with the CMP pads by pneumatic pressure
Data Source
AI summary
A conditioning apparatus includes an arm configured to be rotated by an actuator, a gimbaling part disposed at one end of the arm and disposed such that a lower end thereof protrudes outwardly of the arm and an abrasive disc is installed thereon, a frame unit connected to the gimbaling part, a rotation driving unit connected to the gimbaling part and configured to transfer driving force for rotating the abrasive disc, a load applying unit connected to the frame unit and configured to elevate the frame unit, and a universal joint connecting the gimbaling part to the rotation driving unit, wherein the universal joint separates a center of gravity of the rotation driving unit from a center of gravity of the gimbaling part.