Substrate Processing Schedule Optimization for CMP Transfer Timing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses face challenges in optimizing the operation timing of multiple units (polishing, finishing, and transfer) to minimize the total processing time for a series of substrates, leading to inefficiencies in chemical mechanical polishing processes.
Innovation Solution
An information processing apparatus that acquires recipe and transfer time information to create a substrate processing schedule, determining the start timing of each processing step to ensure the final processing end time is shortest, by using a combination of processing time calculation and mathematical optimization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple polishing units, finishing units, and transfer units are configured in parallel to improve processing efficiency, then the productivity increases, but the complexity of determining optimal operation timing and scheduling increases
Solution Approach 1:
The system performs preliminary calculation of processing times for all units before execution. The management device acquires operation time information in advance, calculates the makespan and identifies critical path activities beforehand, enabling optimized scheduling without real-time complexity
Solution Approach 2:
The patent replaces manual or heuristic scheduling methods with an automated information processing system that uses mathematical algorithms (critical path method, makespan calculation) to determine optimal operation timing automatically
2Loss of time
If operation timing is optimized to minimize total processing time, then the loss of time is reduced, but the complexity of coordinating multiple units increases
Solution Approach 1:
The management device continuously monitors actual operation times and compares them with scheduled times. It uses this feedback to adjust subsequent scheduling decisions, ensuring minimal total processing time while adapting to variations in unit performance
Solution Approach 2:
The scheduling system is designed to be dynamic rather than static. It can adjust operation timing and unit assignment in response to actual processing conditions, maintaining optimization even when processing times vary
Data Source
AI summary
An information processing apparatus includes: an information acquisition part, acquiring recipe information indicating processing content of polishing processing and finishing processing, and transfer time information indicating a transfer time required for each transfer processing; and a schedule creation part, based on the recipe information and the transfer time information, creating a substrate processing schedule by determining a start timing of each processing so that a final processing end time during which a final substrate after the finishing processing is carried out to a substrate carry-out position is shortest.