CMP Slurry Blend Module for Uniform Supply and Particle Suspension
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Solution Overview
Problem
Existing semiconductor fabrication processes face challenges in consistently supplying and blending abrasive slurries and chemical blends for chemical-mechanical planarization (CMP) due to rapid deterioration and particle suspension issues, requiring on-site blending and rapid delivery to maintain uniformity and prevent agglomeration.
Innovation Solution
A slurry and chemical blend supply apparatus with a blend module, static mixers, and pumps that combines component streams upstream of a pump to create a consistent blend, while also incorporating analytical modules for quality control and distribution systems to ensure continuous flow and particle suspension, addressing the issues of rapid deterioration and agglomeration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If blended slurry is prepared in advance, then production efficiency is improved, but slurry deteriorates and particles agglomerate within hours
Solution Approach 1:
The system performs preliminary blending of slurry components in a controlled environment with proper agitation and filtration, then stores the blended slurry in a prepared state ready for immediate use, extending its stable lifespan without requiring on-site blending
Solution Approach 2:
The patent introduces an intermediate storage system with controlled conditions (agitation, filtration, temperature control) that acts as a mediator between slurry preparation and use, maintaining slurry stability during storage and preventing agglomeration
2Loss of time
If slurry components are combined early, then delivery time is reduced, but particle suspension is compromised and agglomeration occurs
Solution Approach 1:
The system implements continuous agitation and circulation of the blended slurry in storage tanks, ensuring particles remain suspended and evenly distributed throughout the storage period, maintaining reliability until delivery
Solution Approach 2:
The system performs preliminary blending and stabilization of slurry components with continuous agitation, then maintains this state during storage, allowing rapid delivery without compromising particle suspension
3Manufacturing precision
If on-site blending is performed, then slurry uniformity is maintained, but production complexity increases
Solution Approach 1:
The system performs preliminary blending of slurry components in a controlled environment with proper agitation and filtration, then stores the blended slurry in a prepared state ready for immediate use, extending its stable lifespan without requiring on-site blending
Solution Approach 2:
The patent extracts the blending operation from the point-of-use location and relocates it to a centralized preparation system with controlled conditions, simplifying the overall system by separating blending from delivery
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures consistent and uniform slurry and chemical blends are supplied to CMP tools, preventing agglomeration and maintaining particle suspension, thereby improving the efficiency and quality of semiconductor fabrication processes.
Implementation Method 1
The pump delivers the components to the blend modules at a flow rate that maintains particle suspension
Implementation Method 2
The blend modules may include static mixers
Data Source
Figure 1A
Figure 1B
Figure 1C
AI summary
A slurry and/or chemical blend supply apparatus (20) comprising a blend module (200) that combines two or more flowing component streams (A, B, C) to form a blended slurry and/or chemical blend in a pipe (217), wherein said blend module (200) comprises a pipe (210, 211, 212) for each component stream (A, B, C) and at least one flow controller (260, 261, 262) in each of at least two of the component pipes (210, 211, 212) to control the flow rate of the components (A, B, C) and wherein said component pipes (210, 211, 212) are connected and combined into a single pipe (217) to form the blended slurry or blended chemical blend stream and further comprising a distribution module (400) comprising one or more distribution tanks (491A), one or more global loops (111A), and one or more pumps (101A), said distribution module (400) further comprising one or more back pressure controllers (84A), and pressure sensors (78A) on each of said one or more global loops (111A); wherein said distribution tank (491A) comprises one or more eductors (761, 763) in the bottom portion of said distribution tank (491A) and wherein the return exit pipes (86A, 86B) of the one or more global loops (111A) are connected to the one or more distribution tanks (491A) and and the one or more eductors (761, 763) are attached to the exit of the return pipes (86A, 86B) of the global loops (111A) into the distribution tank (491A).