Automated CMP Slurry Drum Handling for Uniform Chemical Supply
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Solution Overview
Problem
Manual handling of chemical liquids in drum-type CMP slurry supply leads to safety risks, process inaccuracies, and contamination issues, including exposure to hazardous substances, non-fitting of drums, and non-uniform mixing and supply.
Innovation Solution
An automated apparatus and method for supplying chemical liquids using a drum washer unit, drum shaker unit, chemical liquid ejector units, and a controller to manage the process, ensuring safe and precise handling through automated drum washing, mixing, and uniform ejection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual handling is used for drum-type CMP slurry supply, then workers can directly check and replace drums, but safety risks occur due to exposure to hazardous chemicals
Solution Approach 1:
The system enables self-service operation where the automated apparatus performs drum checking, washing, shaking, and replacement without worker intervention. Sensors detect drum levels and the controller automatically manages the entire slurry supply process, eliminating worker exposure to hazardous chemicals while maintaining operational capability
Solution Approach 2:
The patent replaces manual mechanical handling with an automated mechanical system. The automated drum handler, washing apparatus, and shaking mechanism substitute worker actions, providing safe yet effective drum management for hazardous chemical slurry supply
2Ease of operation
If manual handling is used for drum-type CMP slurry supply, then workers can directly operate the slurry apparatus, but process inaccuracies occur due to human error
Solution Approach 1:
The system incorporates sensors that detect slurry levels, drum positions, and operational parameters. This feedback is transmitted to the controller, which automatically adjusts operations to maintain precise slurry supply, eliminating human error while preserving operational effectiveness
Solution Approach 2:
The patent replaces manual operational control with an automated control system that uses sensors and controllers to precisely manage slurry supply processes, ensuring consistent and accurate operation without human error
3Ease of operation
If manual handling is used for drum-type CMP slurry supply, then workers can directly handle drums, but contamination occurs due to foreign substances entering the slurry
Solution Approach 1:
The system extracts workers from the slurry handling environment entirely. Automated drum handlers and washing apparatuses perform all drum handling operations in isolated, controlled environments, preventing foreign substance contamination while maintaining efficient drum management
Solution Approach 2:
The automated system performs self-service drum handling, washing, and replacement without worker contact. This eliminates the risk of foreign substance contamination from worker clothing, skin, or tools while maintaining operational efficiency
4Ease of operation
If manual handling is used for drum-type CMP slurry supply, then workers can directly mix and supply slurry, but non-uniform mixing occurs in the drum
Solution Approach 1:
The system employs a drum shaking mechanism that applies controlled vibration and rotation to the drum, ensuring uniform slurry mixing. This mechanical vibration approach achieves consistent mixing results that manual agitation cannot provide, maintaining slurry uniformity throughout the supply process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents worker exposure to hazardous chemicals, reduces process inaccuracies, and ensures uniform supply by automating the handling of chemical liquids, thereby enhancing safety and productivity.
Implementation Method 1
the drum receiver rotates a drum 360° so that a chemical liquid and minute particles in the drum are uniformly mixed
Implementation Method 2
a through-hole for discharging a chemical liquid to the outside is formed in the dip tube
Implementation Method 3
uses at least one of washing solution spraying, air spraying, nitrogen (N2) spraying, and ionizer washing
Data Source
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AI summary
The present disclosure relates to an apparatus and method for supplying a chemical liquid using an automated process. The apparatus includes: a drum washer unit configured to wash a drum keeping a chemical liquid; a drum shaker unit configured to mix a chemical liquid in a drum conveyed from the drum washer unit by rotating the drum; at least one chemical liquid ejector unit configured to eject a chemical liquid, which is kept in a drum conveyed from the drum shaker unit, to the outside using a dip tube; and a controller configured to perform control such that a drum finishes being used at the chemical liquid ejector unit is replaced with a new drum by operating at least one of the drum washer unit and the drum shaker unit for the new drum when the amount of a chemical liquid remaining in the drum at the chemical liquid ejector unit becomes a predetermined amount or less.