CMP Top Ring Lifting Jig for Easier Mounting and Dismounting
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The increasing size and weight of top rings in CMP devices make it difficult to dismount and mount them during maintenance, posing a challenge in the polishing process.
Innovation Solution
A jig is designed with a movable plate, positioning posts, and a drive mechanism to assist in the mounting and dismounting of top rings, allowing for easier handling and positioning on the polishing apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the top ring size and weight are increased to accommodate larger substrates, then substrate processing capability is improved, but the ease of dismounting and mounting the top ring deteriorates
Solution Approach 1:
A lifting device is introduced as an intermediary tool between the operator and the heavy top ring. The lifting device includes a lifting table that can be positioned under the top ring and a lifting mechanism that raises the top ring off the polishing table, making it easier to handle the heavy component without direct manual lifting
Solution Approach 2:
The lifting device provides an upward lifting force that counteracts the downward gravitational force on the heavy top ring. By using the lifting mechanism to generate an upward force equal to or greater than the weight of the top ring, the effective weight to be handled by operators is reduced, enabling easier dismounting and mounting operations
2Quantity of substance
If the top ring weight is increased to support larger substrates, then substrate holding capacity is improved, but the difficulty of maintenance operations increases
Solution Approach 1:
The lifting device serves as a mediator during maintenance operations, allowing the heavy top ring to be easily raised and lowered for access to internal components. The lifting table positions the top ring at a convenient height for maintenance personnel to work on the component, improving ease of repair despite the increased weight
Solution Approach 2:
The top ring is designed as an assembly of multiple components (upper member, intermediate member, lower member, retainer portion) that can be disassembled and handled separately. The lifting device facilitates the removal and reattachment of these segmented components during maintenance, making it easier to service the heavy overall structure
Data Source
AI summary
Provided is a jig for assisting the dismounting and mounting of a top ring.One embodiment provides a jig for mounting/dismounting at least a part of the top ring for holding a substrate. The jig comprises a movable plate for supporting at least a part of the top ring, which is in a dismounted state, a plurality of posts for positioning the jig at a predetermined position relative to the top ring, the plurality of posts being configured to be engaged with the top ring, and a drive mechanism for moving the movable plate in a direction toward and away from the top ring.