CMP Wastewater Azole Treatment Using Free-Radical Oxidation
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Solution Overview
Problem
Conventional wastewater treatment methods for azoles in chemical-mechanical polishing (CMP) processes are inefficient and costly due to the high chemical stability of azoles, leading to increased chemical usage and treatment costs, and the high volume of CMP wastewater generated by advanced semiconductor processes.
Innovation Solution
A method involving a wastewater treatment system that produces and introduces free radicals, such as through advanced oxidation processes (AOP) or dissolved iron treatment, to reduce azole concentrations in CMP wastewater, achieving a second azole concentration less than 10 mg/L, suitable for downstream processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional wastewater treatment methods are used, then treatment processes can be implemented, but treatment efficiency is poor and costs increase due to the high chemical stability of azoles
Solution Approach 1:
The patent applies advanced oxidation processes using strong oxidants such as ozone (O3), hydrogen peroxide (H2O2), and persulfate to decompose the chemically stable azole compounds. These strong oxidants overcome the high chemical stability of azoles by generating highly reactive species that can break down the stable chemical bonds in azole molecules, thereby achieving effective treatment while reducing chemical usage compared to conventional methods
Solution Approach 2:
The patent replaces conventional mechanical and biological treatment systems with chemical oxidation-based treatment. Instead of relying on mechanical separation or biological degradation which are ineffective against stable azoles, the system uses chemical oxidation reactions to directly decompose the compounds, improving treatment efficiency and reducing dependency on extensive chemical additives
2Manufacturing precision
If conventional treatment methods are used, then some azole removal may occur, but treatment costs increase due to high chemical usage
Solution Approach 1:
The patent uses strong oxidants (ozone, hydrogen peroxide, persulfate) that are highly effective at decomposing azoles with lower chemical consumption. These oxidants achieve precise concentration reduction through controlled oxidation reactions, lowering treatment costs while maintaining manufacturing precision in azole removal
Solution Approach 2:
The patent optimizes treatment parameters including oxidant dosage, contact time, pH levels, and temperature to achieve cost-effective azole removal. By carefully adjusting these parameters, the system achieves precise concentration reduction without excessive chemical usage, thereby controlling treatment costs
3Reliability
If advanced oxidation processes are used, then azole concentrations can be reduced to suitable levels, but the system complexity increases
Solution Approach 1:
The patent employs a multi-functional treatment system that can handle various azole compounds and wastewater conditions using the same advanced oxidation process. The system provides universal applicability for different azole types and concentration levels, achieving reliable concentration control while avoiding the need for multiple specialized treatment systems
Solution Approach 2:
The patent incorporates monitoring and feedback mechanisms to control the advanced oxidation process. By measuring azole concentrations and treatment parameters in real-time, the system automatically adjusts oxidant dosage and process conditions, achieving precise concentration control while simplifying operation through automated feedback loops
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively reduces azole concentrations to levels suitable for downstream treatment, reducing chemical usage and treatment costs while ensuring environmental compliance.
Implementation Method 1
The wastewater treatment system may be constructed and arranged to produce and introduce free radicals into the wastewater
Implementation Method 2
introducing the wastewater to an inlet of an advanced oxidation process (AOP)
Implementation Method 3
exposing the persulfate ions in the wastewater to UV light to produce persulfate radicals
Implementation Method 4
treating the wastewater with a filtration system prior to introduction into the UV-AOP
Data Source
AI summary
Methods of treating CMP wastewater comprising azoles are disclosed. The method includes providing the wastewater having a first azole concentration, introducing the wastewater to an inlet of a wastewater treatment system constructed and arranged to produce and introduce free radicals into the wastewater, and activating the wastewater treatment system to produce and introduce the free radicals into the wastewater in an amount sufficient to reduce the azole concentration in the wastewater and produce treated water having a second azole concentration, less than the first azole concentration. Methods of facilitating treatment of CMP wastewater comprising azoles by providing a water treatment system constructed and arranged to produce and introduce free radicals into the wastewater are disclosed.