Capacitive Ultrasonic Transducer Cavity Thickness Variation

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Solution Overview

Problem

Ultrasonic diagnostic apparatuses face challenges in achieving high spatial resolution and reducing side lobe effects in ultrasonic images, particularly in the elevation direction, due to limitations in controlling the spatial resolution and beam forming technology.

Innovation Solution

The ultrasonic transducer design includes capacitive ultrasonic cells with varying cavity thicknesses and electrode distances based on their locations, forming a concave or convex shape, which allows for improved spatial resolution and reduced side lobe influence without the need for complex time delay circuits, enhancing image quality and diagnostic accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional ultrasonic transducers with uniform cavity thickness are used, then the structure is simple and easy to manufacture, but the spatial resolution in the elevation direction is poor and side lobe effects are prominent

Engineering Contradiction:
Improvespatial resolutionVSAvoidtransducer structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies local quality by varying the cavity thickness of individual ultrasonic cells based on their specific locations within the transducer array. Cells at different positions have different cavity thicknesses to achieve optimized beam forming and reduced side lobe effects, rather than using a uniform structure throughout. This location-dependent customization improves spatial resolution while maintaining manufacturing feasibility through systematic design rules.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements parameter changes by systematically adjusting the cavity thickness parameter of ultrasonic cells according to their positions. By changing this geometric parameter across the array, the transducer achieves improved elevation direction resolution and reduced side lobe artifacts without requiring complex additional components or time delay circuits.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If time delay circuits are used to improve spatial resolution and reduce side lobe effects, then image quality improves, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvespatial resolutionVSAvoidtransducer fabrication
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent replaces the electronic time delay circuit system with a mechanical/structural solution. Instead of using electronic components to achieve beam forming and side lobe reduction, the invention embeds the corrective function directly into the physical structure of the transducer through position-dependent cavity thickness variations, simplifying manufacturing and eliminating complex electronic timing systems.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent applies preliminary action by pre-configuring the cavity thicknesses during transducer fabrication according to predetermined patterns. This upfront structural design incorporates the beam forming and side lobe reduction functionality directly into the device architecture, eliminating the need for complex real-time electronic adjustments or time delay circuits during operation.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If cavity thicknesses are varied based on cell locations, then spatial resolution and image fidelity improve, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvespatial resolutionVSAvoidcavity thickness control
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent applies segmentation by dividing the transducer array into distinct regions or groups of ultrasonic cells, where each segment follows a specific cavity thickness pattern. This segmented approach allows for systematic manufacturing by treating different regions separately with defined thickness specifications, making the precision requirements more manageable compared to continuous variation across the entire array.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design improves spatial resolution in the elevation direction, reduces side lobe artifacts, and stabilizes diagnostic images by adjusting cavity heights and electrode distances, resulting in higher image fidelity and reliability.

Implementation Method 1

A probe in the ultrasonic diagnostic apparatus includes an ultrasonic transducer for converting an electric signal into an ultrasonic signal, or vice versa. The ultrasonic transducer has a plurality of ultrasonic cells that are arranged two-dimensionally. A micromachined ultrasonic transducer (MUT) is adopted as the ultrasonic cell. The MUT may be classified as a piezoelectric MUT (pMUT), a capacitive MUT (cMUT), and a magnetic MUT (mMUT) according to a conversion type thereof.

Methodology Applied
Scientific EffectElectrostatic actuation: Electrostatics

Implementation Method 2

thicknesses of cavities in the plurality of capacitive ultrasonic cells are determined based on locations of the plurality of capacitive ultrasonic cells in the predetermined direction

Methodology Applied
Scientific EffectAcoustic focusing: Focusing

Data Source

PatentUS9678201B2Ultrasonic transducer and ultrasonic diagnostic apparatus employing the same
Publication Date: 2017.06.13 SAMSUNG ELECTRONICS CO LTD
  • US9678201B2 patent drawing
  • US9678201B2 patent drawing
  • US9678201B2 patent drawing

AI summary

An ultrasonic transducer includes a substrate; and a plurality of capacitive ultrasonic cells arranged on the substrate in a predetermined direction. Thicknesses of cavities in the plurality of capacitive ultrasonic cells are determined based on locations of the plurality of capacitive ultrasonic cells in the predetermined direction.