CMUT Flexible Hinge Structure for Adjustable Ultrasonic Beam Focusing
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Solution Overview
Problem
Conventional ultrasonic transducers require complex circuits for focusing ultrasonic beams and lack the ability to adjust the bending angle, limiting their reusability and flexibility in ultrasonic applications.
Innovation Solution
A capacitive micromachined ultrasonic transducer with a flexible hinge and actuator layer, utilizing a liquid metal fusible alloy and dielectric elastomer, allows for adjustable bending angles by controlling the phase transition of the liquid metal and applying voltages to focus the ultrasonic beam without complex circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional ultrasonic transducers use complex circuits for focusing, then ultrasonic beam focusing is achieved, but device complexity increases
Solution Approach 1:
The patent replaces complex electronic focusing circuits with a mechanical bending mechanism. The ultrasonic transducer element is mounted on a flexible substrate that can be bent into different curvature radii, allowing mechanical adjustment of the ultrasonic beam focus without requiring complex electronic control circuits.
Solution Approach 2:
The patent introduces a dynamic bending mechanism that allows the curvature radius of the flexible substrate to be changed. This enables the ultrasonic transducer to dynamically adjust its focusing characteristics by changing the bending state, providing versatile focusing capability without complex circuits.
2Ease of manufacture
If conventional ultrasonic transducers have fixed structure, then manufacturing is simple, but adaptability decreases
Solution Approach 1:
The patent uses a flexible substrate (flexible hinge) instead of a rigid structure. This flexible substrate can be bent into different curvature radii while maintaining structural simplicity, enabling the transducer to adapt to different application requirements without complicating the manufacturing process.
Solution Approach 2:
The patent changes the curvature radius parameter of the flexible substrate to achieve different bending angles. By simply adjusting the bending degree of the flexible hinge, the ultrasonic transducer can adapt to various focal lengths and beam directions while keeping the base structure simple and easy to manufacture.
3Device complexity
If ultrasonic transducer uses fixed bending angle, then device simplicity is maintained, but operational flexibility decreases
Solution Approach 1:
The patent transforms the static bending angle into a dynamic parameter. The flexible hinge allows the ultrasonic transducer element to be bent at different angles, enabling operational flexibility to adjust beam direction and focus while maintaining the simplicity of the overall device structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reusable ultrasonic focusing with adjustable beam intensity and focal area, maintaining beam quality through reversible deformation and controlled bending angles, enhancing the transducer's operational flexibility and efficiency.
Implementation Method 1
The liquid metal layer may undergo a phase transition from solid to liquid based on heat generated by a voltage applied to the substrate
Implementation Method 2
heat generated by a voltage applied to the substrate
Implementation Method 3
The dielectric elastomer may bend by a voltage applied to the first electrode layer and the second electrode layer
Implementation Method 4
a CMUT performs energy conversion based on a change in the capacitance of a cavity caused by vibrations of a membrane
Data Source
AI summary
Disclosed are a capacitive micromachined ultrasonic transducer having an adjustable bending angle and a method for manufacturing same. The ultrasonic transducer according to one embodiment may comprise: a substrate; a plurality of transducer elements spaced apart from each other and stacked on top of the substrate; flexible hinges which are positioned between the plurality of transducer elements and formed so as to pass through the substrate; a first polymer layer formed so as to cover the bottom of the substrate; and an actuator layer formed under the first polymer layer.