CMUT Microarray Hyperbolic Paraboloid Geometry Noise Reduction

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Solution Overview

Problem

Existing processes for fabricating capacitive micromachined ultrasonic transducers (CMUTs) require precise manufacturing tolerances, limiting the widespread adoption of CMUT sensor arrays in commercial applications due to sensitivity to noise and difficulty in modifying designs for various sensor applications.

Innovation Solution

A CMUT-based microarray with a hyperbolic paraboloid geometry and adjustable frequencies, manufactured using improved methods such as 3D printing, allowing for programmable bandwidth control and reduced interference, with transducers arranged in a matrix configuration for selective activation and beam shaping.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional CMUT fabrication processes are used, then manufacturing precision can be achieved, but device complexity and sensitivity to noise increase

Engineering Contradiction:
Improvemanufacturing toleranceVSAvoidfabrication process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent divides the CMUT array into multiple independent modules, each containing a subset of transducers. This segmentation allows each module to be fabricated and tested separately, reducing the overall complexity of the fabrication process while maintaining manufacturing precision through standardized module designs that can be replicated.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces adjustable operating frequencies and programmable bandwidth control, allowing the sensor system to dynamically adapt to different applications. This dynamic capability reduces sensitivity to noise by selecting optimal frequency ranges, thereby resolving the contradiction between maintaining manufacturing precision and reducing device complexity.

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If conventional CMUT fabrication processes are used, then manufacturing precision can be achieved, but adaptability to different sensor applications decreases

Engineering Contradiction:
Improvemanufacturing toleranceVSAvoidapplication-specific adaptability
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent implements programmable bandwidth control and adjustable operating frequencies that allow the same CMUT array hardware to be adapted to different sensor applications through software configuration rather than requiring different physical designs. This maintains manufacturing precision while significantly improving adaptability to various applications such as automotive, rail, and industrial sensing.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent designs a universal CMUT array platform that can serve multiple sensor applications through configurable parameters. The same physical array can be programmed for different frequency ranges, beam patterns, and operational modes, making it versatile across automotive blind-spot monitoring, rail safety, industrial inspection, and other applications without requiring application-specific manufacturing variations.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Object-affected harmful factors

If CMUT sensor arrays are manufactured with precise tolerances, then noise sensitivity is reduced, but ease of manufacture decreases

Engineering Contradiction:
Improvenoise sensitivityVSAvoidcommercial scale production
Core Design Contradiction:
Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The patent divides the large CMUT array into smaller modular units that can be manufactured with standard tolerances and then assembled into the complete array. This segmentation reduces the cumulative effect of manufacturing variations, allowing commercial-scale production with relaxed tolerances while maintaining overall system performance and reducing noise sensitivity through the modular architecture.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses standardized module designs that can be replicated multiple times across the array. By creating identical or near-identical copies of proven modules, the system achieves consistent performance characteristics without requiring tight tolerances across the entire array, facilitating easier commercial manufacturing while maintaining noise immunity through design consistency.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a reliable and versatile ultrasonic sensor system that minimizes noise interference, adapts to different applications, and offers flexible beam shaping, enhancing performance in automotive, rail, and other sensor applications.

Implementation Method 1

capacitive micromachined ultrasonic transducers (CMUTs)

Methodology Applied
Scientific EffectCapacitive coupling: Capacitance

Implementation Method 2

transmission of and receiving signals

Methodology Applied
Scientific EffectUltrasonic vibration: Ultrasonic Vibration

Data Source

PatentUS9035532B2Ultrasonic sensor microarray and method of manufacturing same
Publication Date: 2015.05.19 UNIVERSITY OF WINDSOR
  • US9035532B2 patent drawing
  • US9035532B2 patent drawing
  • US9035532B2 patent drawing

AI summary

A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 Hz.