CMUT with Movable Third Electrode for Frequency Tuning
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Solution Overview
Problem
Capacitive micro-machined ultrasonic transducers (CMUT) in ultrasonic probes are limited to detecting in a single frequency range, restricting their application to specific body parts and medical examinations.
Innovation Solution
A capacitive micro-machined ultrasonic transducer design that includes a first electrode, a vibrating diaphragm layer, and a third electrode, where the third electrode moves under an electric field to change the effective area of the cavity between the electrodes, allowing for adjustable resonance frequencies by controlling the electrical signals applied, thereby broadening the frequency range and application scope.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a traditional CMUT structure with fixed electrodes is used, then the device is simple in structure, but the frequency range is limited to a single detection range
Solution Approach 1:
The patent introduces a movable third electrode that can change position under electric field control, transforming the static CMUT structure into a dynamic one. This allows the effective cavity area to be adjusted, thereby changing the resonance frequency of the ultrasonic transducer. The movable electrode enables frequency switching between different ranges while maintaining a relatively simple overall structure.
Solution Approach 2:
The patent changes the physical parameter of the cavity area by moving the third electrode to different positions. By controlling the electric field applied to the movable electrode, the effective area of the cavity is adjusted, which directly changes the resonance frequency parameter of the ultrasonic transducer, enabling operation across multiple frequency ranges.
2Adaptability or versatility
If the cavity area is fixed, then the manufacturing process is simple, but the resonance frequency cannot be adjusted
Solution Approach 1:
The cavity structure is made dynamic by introducing a movable electrode that can change the effective cavity area. Instead of manufacturing multiple cavities with different fixed areas, the patent uses a single cavity whose effective area can be dynamically adjusted through electrode movement, simplifying the manufacturing process while enabling frequency adjustment.
3Adaptability or versatility
If a single frequency range is supported, then the device structure is simple, but the application scope is limited to specific body parts
Solution Approach 1:
The patent makes the ultrasonic transducer multi-functional by enabling it to operate in multiple frequency ranges. The movable third electrode allows the same transducer structure to be adapted for different examination applications (abdominal, cardiac, small organs, eye, skin, intravascular, and biological microscope imaging), making a single device universal for various medical imaging needs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables controllable frequency switching between different ranges, expanding the ultrasonic probe's application from abdominal and cardiac examinations to small organs, eye examinations, skin, intravascular, and biological microscope imaging, enhancing the versatility of ultrasound imaging.
Implementation Method 1
the third electrode moves to the first electrode under the action of an electric field
Implementation Method 2
capacitive micro-machined ultrasonic transducer
Data Source
AI summary
The present disclosure provides a capacitive micro-machined ultrasonic transducer, a method for preparing the same, a panel, and a device, and belongs to the technical field of ultrasonic imaging. A capacitive micro-machined ultrasonic transducer includes a first electrode, a vibrating diaphragm layer and a second electrode that are arranged in order from bottom to top, a cavity existing between the first electrode and the vibrating diaphragm layer, in which the capacitive micro-machined ultrasonic transducer further includes a third electrode located on a surface of the vibrating diaphragm layer proximate to the cavity, an orthogonal projection of the third electrode on the first electrode covers a part of an orthogonal projection of the cavity on the first electrode. The technical solution of the present disclosure can realize the conversion of the frequency of the ultrasonic waves emitted by the capacitive micro-machined ultrasonic transducer.