CMUT Spring Structure for High Displacement
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Solution Overview
Problem
Capacitive micromachined ultrasonic transducers (CMUTs) face limitations in displacement capability due to material and configuration constraints, affecting their performance in transmitting and receiving ultrasonic energy effectively.
Innovation Solution
A transducer apparatus with a spring structure that includes a substrate, anchors, and a plate with spring members, allowing for significant and consistent displacement, enabling enhanced capacitance changes and improved ultrasonic energy transmission and reception by using flexible spring members that support the plate for resilient movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If a flexible membrane is used to enable electrode displacement, then displacement capability is improved, but displacement is still limited due to material and configuration constraints
Solution Approach 1:
The patent changes the fundamental parameter of displacement mechanism from membrane flexing to spring member compression/extension. This allows displacement to be governed by spring constants and pre-compression forces rather than membrane material properties, enabling larger and more consistent displacement ranges while maintaining reliability through controlled mechanical parameters
2Power
If membrane displacement is increased to improve ultrasonic energy transmission, then transmission effectiveness is improved, but membrane material constraints and physical configuration limitations are exceeded
Solution Approach 1:
The patent replaces the membrane-based mechanical displacement system with a spring member-based system. This substitution allows for greater displacement capability and improved ultrasonic energy transmission without being constrained by membrane material properties, while the spring mechanism can be integrated into existing CMUT configurations without significant complexity increases
3Length of moving object
If spring members with larger pre-compression are used, then displacement capability is improved, but the spring members may become unstable or lose contact
Solution Approach 1:
The patent applies partial pre-compression to the spring members rather than excessive pre-compression. This partial pre-compression is sufficient to ensure stable contact and consistent displacement generation while avoiding the instability and contact loss issues that would result from excessive pre-compression forces
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The spring structure design enables larger and consistent displacement of the transducer element, improving the sensitivity and bandwidth of CMUTs, allowing for more effective transmission and reception of ultrasonic energy while maintaining a sealed environment.
Implementation Method 1
a spring structure that includes a substrate, anchors, and a plate with spring members, allowing for significant and consistent displacement, enabling enhanced capacitance changes
Implementation Method 2
Capacitive micromachined ultrasonic transducers (CMUTs) face limitations in displacement capability
Implementation Method 3
improving the sensitivity and bandwidth of CMUTs, allowing for more effective transmission and reception of ultrasonic energy
Data Source
AI summary
In some examples, a method of fabricating a transducer includes disposing a plurality of anchors on a substrate and disposing a sealing material and a device layer over the anchors and the substrate to form a cavity, the sealing material sealing the cavity. The method may further include forming, in the device layer, a plate and at least one spring member. The at least one spring member may be supported by at least one anchor of the plurality of anchors, and the at least one spring member may support the plate to allow relative movement between the plate and the substrate.