cMUT Cells with Variable Membrane Thickness for Broadband Ultrasound
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Solution Overview
Problem
Conventional capacitive micro-machined ultrasonic transducers (cMUTs) are limited in receiving signals across the entire frequency band, despite being capable of transmitting broader frequency bands, which restricts their application in medical diagnostic imaging and ultrasound devices for organs of varying sizes and depths.
Innovation Solution
A micro-machined electro-acoustic transducer design featuring cells with membranes of different thicknesses, arranged in a two-dimensional array, where each cell includes a substrate with a conductive material and an insulating layer, allowing for broader frequency bands by combining cells with distinct resonant frequencies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional cMUT design with uniform membrane thickness is used, then manufacturing is simplified, but frequency band coverage is limited
Solution Approach 1:
The patent applies local quality by varying the membrane thickness at different locations within the cell structure. Specifically, the membrane has a first thickness in a first region and a second thickness different from the first thickness in a second region. This local variation in thickness allows different regions to resonate at different frequencies, thereby expanding the overall frequency band coverage while maintaining a relatively simple manufacturing process through selective area etching or deposition techniques.
2Adaptability or versatility
If cells with different resonant frequencies are combined, then frequency band coverage is improved, but device complexity increases
Solution Approach 1:
The patent merges multiple resonant frequency capabilities into a single cell structure by incorporating regions with different membrane thicknesses within the same cell. This allows one cell to function as multiple cells with different resonant frequencies, thereby expanding frequency band coverage without proportionally increasing device complexity. The merged structure achieves broadband coverage while maintaining a compact and relatively simple overall device architecture.
Solution Approach 2:
The patent segments the membrane into different thickness regions within a single cell, creating distinct functional zones that resonate at different frequencies. This segmentation approach allows the cell to cover a broader frequency band while avoiding the complexity of assembling multiple separate cells with different resonant frequencies. The segmented structure is achieved through controlled manufacturing processes that create thickness variations in specific areas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The transducer achieves a broader frequency band by combining cells with different membrane thicknesses, enhancing its capability for ultrasound imaging and diagnostics across various organ sizes and depths.
Implementation Method 1
capacitive micro-machined ultrasound transducer (cMUT)
Implementation Method 2
cells with different resonant frequencies
Implementation Method 3
capacitive micro-machined ultrasound transducer (cMUT)
Implementation Method 4
cells with different resonant frequencies
Data Source
AI summary
An electro-acoustic transducer includes a plurality of elements that each includes a plurality of cells. The plurality of cells includes at least two membranes that have different thicknesses. The respective frequency bands of the plurality of elements are broader than respective frequency bands of the plurality of cells that configure the plurality of elements.