CNT Growth Feedback Control for Catalyst Activation

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Solution Overview

Problem

During carbon nanotube (CNT) manufacturing by the CVD method, carbonaceous by-products adhere to the furnace walls, leading to deviations in gas composition and reduced CNT quality and yield due to catalyst deactivation and furnace corrosion.

Innovation Solution

Implementing feedback control to adjust the supply of catalyst activating materials based on measured gas component concentrations of hydrogen, methane, or ethane around the substrate, maintaining optimal growth conditions by maximizing these gas concentrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If CNTs are manufactured in an environment of high carbon concentration, then the manufacturing efficiency of CNTs increases dramatically, but carbon contaminants adhere in large quantities to the furnace wall and gas composition deviates from optimal conditions

Engineering Contradiction:
Improvemanufacturing efficiency of CNTsVSAvoidgas composition control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent implements feedback control by continuously monitoring the concentration of hydrogen, methane, or ethane around the substrate during CNT growth. Based on the monitored concentration, the supply amount of catalyst activating material is dynamically adjusted to maintain optimal gas composition, thereby resolving the contradiction between high productivity and manufacturing precision

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent changes the supply parameters of catalyst activating material (such as water) based on real-time gas composition measurements. By adjusting the concentration and flow rate of catalyst activating material, the system maintains optimal gas composition even in high carbon concentration environments, enabling both high efficiency and precision

Inventive Principle:
Principle #35Parameter changes

2Productivity

If catalyst activating material is supplied to increase catalyst activity, then CNT growth efficiency improves, but carbon contaminants and catalyst activating material trigger chemical reactions that change gas composition

Engineering Contradiction:
Improvecatalyst activityVSAvoidgas composition stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The system uses feedback control to monitor gas composition (hydrogen, methane, or ethane concentration) and dynamically adjusts the supply amount of catalyst activating material. This closed-loop control maintains gas composition stability while preserving high catalyst activity, resolving the contradiction between productivity and composition stability

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system automatically regulates its own operation by using real-time gas composition data to self-adjust the catalyst activating material supply. This self-service mechanism ensures that gas composition remains stable while catalyst activity is maintained at optimal levels

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents carbon contaminant adhesion and corrosion, ensuring high-quality CNT production by maintaining optimal growth environments and extending catalyst activity.

Implementation Method 1

the activity and lifetime of the catalyst are dramatically increased by bringing the catalyst into contact with a catalyst activating material such as water

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 2

the amount of cracking of the source gas changes

Methodology Applied
Scientific EffectThermal cracking: Pyrolysis

Implementation Method 3

carbonaceous by-products other than CNTs (hereinafter also referred to as 'carbon contaminants'), such as amorphous carbon, graphite, and the like adhere in large quantities to the inner wall surface of the furnace

Methodology Applied
Scientific EffectChemical deposition: Deposition (physical)

Implementation Method 4

Corrosion, such as permeation of carbon (carburizing) into the furnace wall, also progresses

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS9815698B2Method of manufacturing carbon nanotubes
Publication Date: 2017.11.14 ZEON CORP
  • US9815698B2 patent drawing
  • US9815698B2 patent drawing
  • US9815698B2 patent drawing

AI summary

This method improves a carbon nanotube growth environment. In this method of manufacturing carbon nanotubes, the supply amount of catalyst activating material supplied in a carbon nanotube growing step is adjusted to the supply amount of catalyst activating material supplied at the time of maximum concentration of a gas component among multiple measurements made in the growing step, the gas component being at least one selected from the group consisting of hydrogen, methane, and ethane.