Carbon Nanotube Heating Membrane for EDS-Compatible Sample Heating

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Solution Overview

Problem

Existing charged particle microscopy techniques face challenges in accurately analyzing thermal properties of materials due to the interference of EM radiation, which creates artefacts in energy dispersive x-ray detector data, necessitating improved sample heating systems compatible with EDS detectors.

Innovation Solution

A heating assembly utilizing a membrane made of carbon nanotube material, supported by a conductive structure, and coupled with a heating circuit to direct electrical current, which is designed to minimize thermal radiation interference while preserving x-ray transparency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a conventional heating system is used to heat samples for thermal property analysis, then heating capability is provided, but EM radiation from the heating system creates artefacts in EDS detector data

Engineering Contradiction:
Improvesample heating capabilityVSAvoidEM radiation interference
Core Design Contradiction:
TemperatureVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and removes the harmful EM radiation-emitting components from the heating system. By using a heated block design where only the sample contact surface is heated to minimal temperatures, the system eliminates the primary source of thermal radiation that would otherwise interfere with EDS detectors, while still providing effective heating to the sample through direct thermal contact.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The heating system applies heat locally and selectively to the sample contact surface of the heated block, rather than heating the entire block to high temperatures. This localized heating approach ensures that the sample receives adequate thermal energy for analysis while the bulk of the heating assembly remains at lower temperatures, minimizing EM radiation emissions in the direction of the EDS detectors.

Inventive Principle:
Principle #3Local quality

2Stability of the object's composition

If a heating system with high thermal mass is used, then heating stability is improved, but dynamic response to temperature changes is slowed

Engineering Contradiction:
Improveheating stabilityVSAvoiddynamic response
Core Design Contradiction:
Stability of the object's compositionVSSpeed

Solution Approach 1:

The heating system is segmented into distinct functional zones: a large thermal mass block for stability, a minimal heated contact surface for rapid response, and a thermally isolated transition region. This segmentation allows the system to simultaneously achieve heating stability through the large block while maintaining dynamic response through the minimal heated surface area that can quickly equilibrate with the sample.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system dynamically adjusts the thermal gradient within the heated block, maintaining a large temperature differential between the heated contact surface and the bulk block. This dynamic thermal management allows the minimal heated surface to rapidly respond to temperature control signals while the larger thermal mass provides stability and inertia against external disturbances.

Inventive Principle:
Principle #15Dynamics

3Volume of moving object

If a compact heating assembly is used, then integration with charged particle beam systems is improved, but heating uniformity across the sample may be compromised

Engineering Contradiction:
Improveassembly sizeVSAvoidheating uniformity
Core Design Contradiction:
Volume of moving objectVSStability of the object's composition

Solution Approach 1:

The heating system employs a thin-film heated contact surface on the heated block that can conform to and maintain intimate thermal contact with the sample. This thin-film approach allows for compact integration within the charged particle beam system while ensuring uniform heat transfer to the sample through direct contact, compensating for the reduced size with efficient thermal coupling.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces infrared radiation flux to detectors, enhances dynamic response, improves heating localization, and supports multiple sample types, offering improved manufacturability and compatibility with various charged particle beam systems.

Implementation Method 1

The heating circuit can be configured to direct an electrical current through the membrane

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

A charged particle beam system can include a sample chamber, coupled with the charged particle beam source, and a heating assembly, disposed in the sample chamber

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250279259A1Heating assembly for charged particle beam system
Publication Date: 2025.09.04 FEI CO
  • US20250279259A1 patent drawing
  • US20250279259A1 patent drawing
  • US20250279259A1 patent drawing

AI summary

Systems, devices, and techniques for heating a sample are described. A heating assembly can include a membrane. The membrane can include carbon nanotube material. The heating assembly includes a support, mechanically coupled with the membrane. The support can be configured to integrate with a charged particle beam system. The heating assembly also includes a heating circuit, electrically coupled with the membrane. The heating circuit can be configured to direct an electrical current through the membrane.