Carbon Nanotube Pellicle Film Balancing EUV Transmission and Particle Capture
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Solution Overview
Problem
Existing pellicle films with carbon nanotubes lack optimal pore characteristics, leading to a trade-off between foreign matter capturing performance and EUV transmissivity, with large apertures improving EUV transmissivity but compromising capturing performance.
Innovation Solution
A pellicle film with a porous structure containing carbon nanotubes, featuring an aperture ratio of 30% or less and a light transmittance of 50% or more at 550 nm, with carbon nanotubes ranging from 0.1 µm to 1,000 µm and a cross-sectional diameter of 0.2 nm to 50 nm, allowing for favorable foreign matter capturing and high EUV transmissivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If the aperture ratio of pores is increased to improve EUV transmissivity, then the EUV transmissivity is improved, but the foreign matter capturing performance decreases
Solution Approach 1:
The pellicle film utilizes a porous structure with controlled aperture ratios (5-30%) to achieve optimal balance between EUV transmissivity and foreign matter capturing performance. The porous structure allows EUV light to pass through while the pore size and distribution are optimized to capture foreign matter effectively.
Solution Approach 2:
The invention optimizes specific parameters including aperture ratio (5-30%), carbon nanotube length (0.1-100 μm), and carbon nanotube diameter (0.2-50 nm) to achieve the desired balance. By carefully controlling these parameters, the pellicle film achieves both high EUV transmissivity (light transmittance at 550 nm of 50% or more) and effective foreign matter capturing.
2Reliability
If the aperture ratio of pores is decreased to improve foreign matter capturing performance, then the foreign matter capturing performance is improved, but the EUV transmissivity decreases
Solution Approach 1:
The pellicle film utilizes a porous structure with controlled aperture ratios (5-30%) to achieve optimal balance between EUV transmissivity and foreign matter capturing performance. The porous structure allows EUV light to pass through while the pore size and distribution are optimized to capture foreign matter effectively.
Solution Approach 2:
The invention employs a composite structure combining carbon nanotubes with a porous matrix. The carbon nanotubes (length: 0.1-100 μm, diameter: 0.2-50 nm) provide structural integrity and enhance foreign matter capturing, while the porous structure ensures adequate EUV transmissivity. This composite approach allows simultaneous optimization of both functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The pellicle film achieves both effective foreign matter capturing and high EUV transmissivity by balancing pore characteristics, ensuring a light transmittance of 50% or more at 550 nm and aperture ratios of 5% to 30%, enhancing operational efficiency in semiconductor manufacturing.
Implementation Method 1
the pellicle film has a light transmittance at a wavelength of 550 nm of 50% or more
Data Source
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AI summary
A pellicle film (10) having a porous structure includes carbon nanotubes, has an aperture ratio of pores of 30% or less as measured at a surface of the porous structure, and has a light transmittance at a wavelength of 550 nm of 50% or more.