Carbon Nanotube Pellicle Film with Uniform Pore Structure

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Solution Overview

Problem

Existing pellicle films with carbon nanotubes lack consistency in pore characteristics, affecting their strength and EUV transmissivity, necessitating improvements.

Innovation Solution

A pellicle film with a porous structure containing carbon nanotubes, where the coefficient of variation of pore diameters and nearest-neighbor centroid-to-centroid distances is controlled within specific ranges, enhancing strength and reducing EUV transmissivity variation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If carbon nanotubes are used as pellicle film material, then strength is improved, but variation in pore characteristics causes variation in EUV transmissivity

Engineering Contradiction:

Improvepellicle film strengthVSAvoidEUV transmissivity consistency

Core Design Contradiction:

StrengthVSReliability

Solution Approach 1:

The invention changes the pore size distribution parameter by controlling the coefficient of variation of pore diameters to be 0.7 or less and the coefficient of variation of nearest-neighbor centroid-to-centroid distances to be 0.6 or less. This parameter control ensures uniform EUV transmissivity while maintaining the high strength properties of carbon nanotube-based pellicle films.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If pellicle film is placed close to photomask to capture foreign matter, then foreign matter capture ability is improved, but risk of breakage during installation and use increases

Engineering Contradiction:

Improveforeign matter capture abilityVSAvoidbreakage resistance

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The invention improves breakage resistance by controlling the pore structure parameters (coefficient of variation of pore diameters ≤ 0.7 and coefficient of variation of nearest-neighbor centroid-to-centroid distances ≤ 0.6), which creates a more uniform and mechanically robust carbon nanotube network while maintaining the proximity placement for effective foreign matter capture.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The pellicle film exhibits improved strength and consistent EUV transmissivity, minimizing variations and preventing breakage during installation and use.

Implementation Method 1

When EUV is applied to a pellicle film, the EUV passes through the pellicle film, but the applied EUV is partially absorbed by the pellicle film. The light energy of the absorbed EUV is converted into thermal energy, whereby the temperature of the pellicle film is increased.

Methodology Applied

Scientific EffectLight absorption and thermal energy conversion: Absorption (EM radiation)

Data Source

PatentEP4692927A1Pellicle film and pellicle

Publication Date: 2026.02.11 LINTEC CORP

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Figure 3A~3B

AI summary

A pellicle film (10) has a porous structure. The pellicle film (10) includes carbon nanotubes. The coefficient of variation of pore diameters of pores is 0.7 or less, and the coefficient of variation of nearest-neighbor centroid-to-centroid distances between the pores is 0.6 or less, the coefficients of variation being measured at a surface of the porous structure.